Lot-Tool Assignment Using Real-Time Dispatching Feedback
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Solution Overview
Problem
In semiconductor fabrication, the existing automation systems for lot transfer in wafer fabrication facilities lack timely and efficient methods to assign work-in-progress (WIP) to tools, leading to suboptimal processing and potential delays due to inadequate consideration of real-time production data and tool-specific constraints.
Innovation Solution
A method and system that utilize a manufacturing execution system and dispatching system to determine optimal tool-lot assignments based on process constraints and dispatching rules, incorporating feedback to adjust dispatching preferences and priorities, ensuring efficient allocation of WIP across multiple tools in a fab.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If periodic triggering method is used to feed WIP to tool, then system complexity is reduced, but timeliness of lot assignment deteriorates
Solution Approach 1:
The patent implements a feedback mechanism where tool status information is continuously monitored and fed back to the dispatching system. This enables the system to respond to real-time conditions and trigger lot assignments based on actual tool availability and status, rather than relying on fixed periodic intervals. The feedback loop ensures timely lot assignment while maintaining manageable system complexity through structured information flow.
Solution Approach 2:
The patent transitions from a static periodic triggering approach to a dynamic event-driven approach. The system dynamically adjusts lot assignment timing based on real-time tool status, lot characteristics, and production priorities. This dynamic behavior enables timely responses to changing conditions without requiring overly complex system architecture, as the triggering is driven by meaningful events rather than arbitrary time intervals.
2Productivity
If real-time data and tool-specific constraints are considered in lot assignment, then processing efficiency is improved, but device complexity increases
Solution Approach 1:
The patent segments the lot assignment problem into distinct components: tool status monitoring, constraint evaluation, priority determination, and assignment execution. Each component is handled by specific system modules with dedicated functions. This segmentation allows the dispatching system to process real-time data and tool-specific constraints in a structured manner, improving processing efficiency while keeping overall system complexity manageable through modular design.
Solution Approach 2:
The patent introduces a dispatching system as an intermediary between the tools and the lot assignment process. This intermediary collects real-time data from multiple sources, evaluates tool-specific constraints, determines optimal assignments, and coordinates the actual lot transfers. The intermediary absorbs the complexity of handling real-time data and constraints, shielding the underlying system from excessive complexity while enabling efficient processing through centralized intelligence.
3Ease of operation
If existing automation systems are used for lot transfer, then ease of operation is maintained, but productivity deteriorates due to suboptimal processing
Solution Approach 1:
The patent implements a self-service mechanism where the dispatching system automatically monitors tool status, evaluates constraints, and triggers lot assignments without requiring manual intervention. The system serves itself by making intelligent decisions based on real-time data, maintaining ease of operation while dramatically improving productivity. The automation handles the complexity of optimal assignment, allowing operators to focus on higher-level tasks while the system optimizes processing efficiency autonomously.
Data Source
AI summary
A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.