Low-Defect Electrochromic Device Fabrication in Integrated Deposition
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Solution Overview
Problem
Electrochromic devices suffer from high levels of defectivity, manifesting as pin holes or spots where the electrochromic transition is impaired, which is unacceptable for applications such as architectural glass.
Innovation Solution
The fabrication of electrochromic devices involves depositing layered components in a single integrated deposition system with a controlled ambient environment, ensuring the substrate remains within a low-pressure atmosphere with low particle levels, using physical vapor deposition to minimize defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If electrochromic devices are fabricated using conventional multi-step deposition processes with substrate exposure to external environment, then manufacturing flexibility is improved, but defectivity increases due to particle contamination
Solution Approach 1:
The patent combines multiple deposition steps (electrochromic layer, ion conducting layer, counter electrode layer) into a single integrated deposition system, eliminating substrate exposure to external environment between steps. This merging of processes maintains manufacturing flexibility while preventing particle contamination that causes defects.
Solution Approach 2:
The patent employs a controlled ambient environment with low pressure and reduced particle levels throughout the deposition process. This inert-like atmosphere prevents contamination from external particles, significantly reducing defectivity while allowing continuous fabrication.
2Measurement precision
If substrate is removed from controlled environment between deposition steps, then process monitoring and adjustment are improved, but particle contamination increases causing defects
Solution Approach 1:
The patent uses an integrated deposition system that acts as an intermediary controlled environment, allowing in-situ monitoring and adjustment of deposition parameters without exposing the substrate to external contamination. The system provides both process control capability and protection from particles simultaneously.
3Manufacturing precision
If multiple deposition steps are performed separately, then process control for each layer is improved, but fabrication time and defect risk increase
Solution Approach 1:
The patent merges multiple deposition steps into a single continuous process within one integrated system, maintaining precise control over each layer's deposition while eliminating idle time between steps. This approach improves productivity without sacrificing layer control precision.
Solution Approach 2:
The patent ensures continuous deposition action without interrupting the substrate in the controlled environment. The integrated system allows sequential deposition of different layers without breaking the vacuum or controlled atmosphere, eliminating contamination risk and reducing total fabrication time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method results in highly reliable electrochromic devices with significantly reduced defects, enabling them to cycle between optical states without noticeable anomalies, suitable for long-term use in architectural glass applications.
Implementation Method 1
In some embodiments, the layers of interest are deposited using physical vapor deposition
Data Source
AI summary
Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition.