Low Profile Extraction Electrode Assembly Alignment
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Solution Overview
Problem
Conventional ion beam implanters face challenges in maintaining precise alignment and focus of extraction electrodes due to manufacturing tolerances and thermal expansion issues, leading to eccentricity and suboptimal ion beam focusing.
Innovation Solution
A low profile, high voltage insulator is used to directly couple a ground electrode and a suppression electrode, maintaining a greater tracking distance than focal distance without additional complex structures, thereby reducing eccentricity and thermal expansion effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If complex mounting arrangements with multiple connective and supportive structures are used to maintain focal distance and tracking distance, then electrical insulation between electrodes is achieved, but manufacturing tolerances aggregate to cause undesirable offset or eccentricity between electrodes
Solution Approach 1:
The patent combines the electrical insulation function and the positioning function into a single integrated insulator structure. The insulator directly couples the ground electrode and suppression electrode, eliminating the need for separate connective and supportive structures. This integration prevents the aggregation of manufacturing tolerances that would occur with multiple separate components, thereby maintaining precise alignment while providing reliable electrical insulation.
Solution Approach 2:
The insulator serves multiple functions simultaneously: it provides electrical insulation between the ground electrode and suppression electrode, maintains the required tracking distance, positions the electrodes at the correct focal distance, and prevents eccentricity. This multi-functional design eliminates the need for separate specialized components for each function, improving both insulation reliability and alignment precision.
2Reliability
If multiple connective and supportive structures are used to couple ground electrode and suppression electrode, then both focal distance and tracking distance are maintained, but the structures are subject to uneven heating and thermal expansion causing increased eccentricity
Solution Approach 1:
By integrating the positioning and insulation functions into a single insulator structure, the patent reduces the number of separate components subject to thermal effects. The unified structure experiences more uniform thermal expansion and contraction compared to multiple separate structures, thereby maintaining distance stability under thermal conditions while preventing eccentricity.
Solution Approach 2:
The insulator is designed with specific geometric features including a first surface, second surface, third surface, and fourth surface that create a optimized thermal and structural configuration. This local geometric quality distribution allows the structure to maintain dimensional stability under thermal stress while providing the required electrical insulation and positioning functions.
3Reliability
If additional complex mounting structures are added to maintain electrode alignment, then electrical insulation is ensured, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent merges the electrical insulation function with the electrode positioning and support functions into a single integrated insulator structure. This eliminates the need for multiple separate connective and supportive components, thereby ensuring reliable electrical insulation while significantly reducing device complexity and manufacturing cost.
Solution Approach 2:
The insulator is designed as a multi-functional component that simultaneously provides electrical insulation, maintains tracking distance, positions electrodes at correct focal distance, and prevents eccentricity. This universal design approach ensures reliable insulation without requiring additional complex mounting structures, reducing both device complexity and manufacturing cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures precise electrical insulation and alignment between electrodes, improving ion beam focus and reducing the complexity and cost of electrode mounting arrangements.
Implementation Method 1
electrically insulating the electrodes from one another is performed to prevent or mitigate the flow of electrical current therebetween
Implementation Method 2
mounting legs extending from a first face of the main body and spaced apart from one another around an axis of the main body, and three mounting legs extending from a second face of the main body
Data Source
AI summary
A low profile extraction electrode assembly including an insulator having a main body, a plurality of spaced apart mounting legs extending from a first face of the main body, a plurality of spaced apart mounting legs extending from a second face of the main body opposite the first face, the plurality of spaced apart mounting legs extending from the second face offset from the plurality of spaced apart mounting legs extending from the first face in a direction orthogonal to an axis of the main body, the low profile extraction electrode assembly further comprising a ground electrode fastened to the mounting legs extending from the first face, and a suppression electrode fastened to the mounting legs extending from the second face, wherein a tracking distance between the ground electrode and the suppression electrode is greater than a focal distance between the ground electrode and the suppression electrode.