Low-Profile Surface Mount Filter Horizontal Gas Flow
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Solution Overview
Problem
Existing low-profile filters for semiconductor manufacturing are prone to leakage and require additional height due to multiple seals, which disrupts gas flow and increases the footprint of gas sticks, making them less efficient and more expensive.
Innovation Solution
A low-profile filter design with a unitary filter housing and a filter assembly that separates the filter cavity into adjacent sections using a sealed adapter, minimizing the number of seals and allowing for horizontal gas flow, thereby reducing height and improving leak-tightness while maintaining sufficient pressure drop and log reduction value (LRV) for semiconductor applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If multiple seals are used in the filter block sections, then the filter can be assembled from separate sections, but the gas flow is interrupted and leakage risk increases
Solution Approach 1:
The patent merges the filter assembly with the substrate block into a single integrated unit. The filter is positioned within a cavity of the substrate block and sealed using the same sealing mechanism (e.g., C-seal or W-seal) that seals the gas component to the substrate. This eliminates the need for separate seals between filter sections and the substrate, thereby maintaining leak-tightness while allowing modular assembly.
2Device complexity
If multiple seals are used between filter sections, then the filter can be constructed in sections, but the wetted surface area and dead space increase
Solution Approach 1:
By integrating the filter into the substrate block as a single piece, the patent eliminates the internal sealing surfaces and dead spaces that would exist between separate filter sections. The gas flow path remains continuous without interruption, minimizing wetted surface area and dead space while still allowing the filter to be manufactured and assembled as part of a modular system.
3Ease of repair
If the filter is mounted on a separate substrate block, then the filter can be easily replaced, but the gas stick becomes longer and heavier
Solution Approach 1:
The patent combines the filter and substrate block into a single integrated component that is mounted directly on the gas component (e.g., mass flow controller or valve). This eliminates the need for a separate substrate block, thereby reducing the overall length and weight of the gas stick. The filter can still be replaced by removing the entire integrated assembly and replacing it with a new one, maintaining ease of repair.
4Device complexity
If vertically aligned purification elements are used, then the filter can be compact, but additional height is required to accommodate the elements
Solution Approach 1:
The patent positions the filter horizontally within a cavity of the substrate block, with the purification element extending in the horizontal direction rather than vertically. The gas flow moves horizontally through the filter, allowing the filter to be compact in height while maintaining sufficient filtration surface area. This dimensional reorientation resolves the contradiction between compactness and height requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the number of seals, minimizing wetted surface area and dead space, leading to faster drying times and reduced potential for particle dislodgement, while maintaining effective filtration and compatibility with existing modular substrate designs.
Implementation Method 1
a filter assembly disposed in the filter cavity and sealed to the surface of the filter cavity that separates the filter cavity into adjacent sections including a first section and a second section
Data Source
Figure 1~3
Figure 4A~4B
Figure 5~7
AI summary
Embodiments of the present invention provide surface mount filters including low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.