Low-Profile Two-Probe Tuner With Fixed-Depth Horizontal Scanning

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Solution Overview

Problem

Existing load pull impedance tuners require high precision and cumbersome vertical probe movement mechanisms, leading to slow tuning procedures due to the need for precise positioning close to the center conductor, and they often result in spurious oscillations and complex calibration processes.

Innovation Solution

A horizontal-only high-speed tuning probe movement mechanism with a low-profile slabline and fixed-depth tuning probes, using rolling ball bearings or sliders, eliminates the need for elaborate vertical axis control and allows for a fast custom de-embedding calibration method, enabling efficient and accurate impedance synthesis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If vertical probe movement mechanisms are used to achieve precise positioning close to the center conductor, then measurement precision is improved, but device complexity and tuning speed deteriorate

Engineering Contradiction:
Improvepositioning precisionVSAvoidmechanism complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent inverts the conventional approach by fixing the probe vertically at a predetermined depth and allowing horizontal movement instead. This eliminates the need for complex vertical positioning mechanisms while maintaining measurement precision through the fixed horizontal displacement method.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent extracts the vertical movement function from the probing mechanism, keeping only the essential horizontal scanning capability. This simplifies the device by removing the elaborate vertical axis control system while preserving the core measurement functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

2Measurement precision

If vertical probe movement mechanisms are used to achieve precise positioning, then measurement precision is improved, but tuning speed deteriorates

Engineering Contradiction:
Improvepositioning precisionVSAvoidtuning speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent inverts the conventional approach by fixing the probe vertically at a predetermined depth and allowing horizontal movement instead. This eliminates the need for complex vertical positioning mechanisms while maintaining measurement precision through the fixed horizontal displacement method.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent segments the positioning function into two independent components: fixed vertical depth and movable horizontal position. This segmentation allows the horizontal scanning to be performed quickly without the constraints of vertical positioning, thereby improving tuning speed.

Inventive Principle:
Principle #1Segmentation

3Measurement precision

If probes are positioned very close to the center conductor to achieve high reflection factors, then measurement precision is improved, but tuning time increases

Engineering Contradiction:
Improvereflection factor accuracyVSAvoidtuning time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary action by pre-positioning the probe at a fixed vertical depth that optimizes the reflection factor. This eliminates the need for time-consuming vertical adjustments during tuning, as the probe is already at the optimal position before horizontal scanning begins.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent extracts the vertical positioning requirement from the tuning process, making it a fixed parameter rather than a variable to be adjusted in real-time. This separation allows the tuning operation to focus solely on horizontal scanning, significantly reducing tuning time.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution significantly reduces tuning error sensitivity and speeds up the calibration process by reducing the number of required measurement points from 10,000 to 200, achieving faster and more accurate load pull measurements.

Implementation Method 1

this movement of the tuning probe creates capacitive coupling and a controllable variable reactance, allowing the synthesis of various impedances

Methodology Applied
Scientific EffectCapacitive coupling: Capacitance

Implementation Method 2

When parallelepiped metallic tuning probes (slugs) 21, FIG. 2, with a concave bottom approach the center conductor 23, they capture and deform the electric field, which is concentrated in the area between the center conductor and the ground planes of the slabline 24. This field deformation allows creating the high and controllable reflection factors.

Methodology Applied
Scientific EffectElectric field capture and deformation: Electric Field

Data Source

PatentUS12199592B1Two probe low profile tuner
Publication Date: 2025.01.14 FOCUSMW IP
  • US12199592B1 patent drawing
  • US12199592B1 patent drawing
  • US12199592B1 patent drawing

AI summary

A low profile two probe load-pull slide screw impedance tuner uses two tuning probes sharing the same slabline; they are inserted diametrically at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable vertical axes controlling the penetration of the probes and its low profile is optimized for on-wafer operations. The carriages holding the probes are moved at high speed along the slabline using linear electric actuators. The ā€œSā€ shaped center conductor allows for a neutral zero 50 Ohm state. An efficient de-embedding calibration method serves speeding up the measurement procedure additionally.