Lower Electrode Mechanism RF Shielding Isolation
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Solution Overview
Problem
The conventional lower electrode mechanism in ICP devices experiences mutual interference between RF connection pins and other metal parts, leading to non-uniform electric fields and radio frequency leakage, affecting the stability of the RF bias.
Innovation Solution
The mechanism incorporates an electromagnetic shielding space and a non-electromagnetic shielding space, isolated from each other, with specific through holes and shielding modules to prevent interference and leakage, using insulating disks and conductive channels to manage RF, heating, and electrostatic components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conductive members (RF connection pin, heating wire, electrostatic adsorption wire) are introduced through the mounting plate to connect to the base, then the base can receive RF power, heating, and electrostatic adsorption functions, but mutual interference occurs between the RF connection pin and other metal parts, affecting electric field uniformity
Solution Approach 1:
The lower electrode chamber is divided into an electromagnetic shielding space and a non-electromagnetic shielding space that are isolated from each other. Conductive members for RF power supply are introduced through the first through hole into the electromagnetic shielding space, while other metal parts are introduced through the second through hole into the non-electromagnetic shielding space. This spatial segmentation prevents mutual interference between different conductive members, maintaining electric field uniformity while integrating multiple functions.
2Power
If the RF connection pin, mounting plate, and base are all conductive materials and electrically connected, then RF power can be transmitted to the base, but radio frequency leakage occurs, affecting RF stability
Solution Approach 1:
An electromagnetic shielding space is introduced as an intermediary environment for the RF connection pin and related conductive members. This shielding space, isolated from the non-electromagnetic shielding space by physical separation, allows RF power transmission while preventing RF leakage to other metal parts. The shielding space acts as a mediator that enables power transmission without compromising RF stability.
Data Source
AI summary
The present disclosure provides a lower electrode mechanism and a reaction chamber, the lower electrode mechanism includes a base for carrying a workpiece to be processed and a lower electrode chamber disposed under the base, the lower electrode chamber includes an electromagnetic shielding space and a non-electromagnetic shielding space isolated from each other, the chamber of the lower electrode chamber includes a first through hole and a second through hole, and the electromagnetic shielding space and the non-electromagnetic shielding space are respectively connected to outside through the first through hole and the second through hole to prevent a plurality of first components disposed in the electromagnetic shielding space from being interfered by a second component disposed in the non-electromagnetic shielding space.