Coupled Low-Power Pulse Generators for Capacitive Plasma Loads
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high power with high voltage and/or high current to capacitive loads, particularly in plasma processes, due to voltage handling limitations of semiconductor switches, especially during high frequency operations.
Innovation Solution
A high-power generator configuration utilizing multiple low-power generators with energy storage components, connected in a coupling to achieve higher output values, and controlled by a unit to generate step-function pulses without continuous slopes, along with balancing and damping circuits for efficient power delivery and oscillation reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is sufficient, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The patent divides a single high-power generator into multiple low-power generators (LP-generators), each operating within safe voltage limits. These LP-generators are connected in series through a coupling circuit, allowing their voltages to add up to achieve the required high output voltage while each individual switch remains within its safe operating range
2Reliability
If multiple low-power generators are connected in series to achieve high voltage, then the voltage handling capability is maintained, but the output value (voltage or current) becomes higher than individual generator capability
Solution Approach 1:
The patent combines multiple LP-generators in a series configuration through a coupling circuit. The control unit coordinates the switching of these generators so that their output values (voltage or current) add up constructively, achieving the desired high output while maintaining reliable operation of individual components
3Productivity
If all LP-generators are activated simultaneously, then the high power pulse is delivered quickly, but voltage overshoots and oscillations occur
Solution Approach 1:
The patent implements preliminary action by sequentially activating LP-generators in stages rather than all at once. The control unit activates generators in a controlled sequence, allowing the system to build up the power pulse gradually and reach the target voltage or current level without causing harmful voltage overshoots or oscillations
Solution Approach 2:
The patent uses periodic action through sequential activation of LP-generators. Instead of a single simultaneous switching event, the control unit employs periodic switching sequences where generators are activated in successive time intervals, creating a controlled ramp-up of power delivery that eliminates transient oscillations
4Object-generated harmful factors
If LP-generators are activated sequentially to reduce overshoot, then voltage transitions become smoother, but the pulse rise time increases
Solution Approach 1:
The patent applies dynamics by making the activation sequence adaptive. The control unit dynamically adjusts the timing and sequencing of LP-generator activation based on real-time system state, optimizing the balance between reducing voltage overshoot and maintaining fast pulse rise time. This dynamic control allows the system to achieve smooth transitions without excessive delay
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and efficient delivery of high power pulses with sharp voltage transitions, reducing power losses and voltage overshoots, and effectively handling capacitive loads in plasma processes without overloading individual switches.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - at least one, preferably several, most preferred all LP-generators (14, 16, 18) comprise a LP-generator-value limiting circuit (151), such as a voltage limiting circuit or a current limiting circuit.