LTCC Cylindrical Ion Trap Fabrication via Metallization
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Solution Overview
Problem
The challenge in miniaturizing mass spectrometers lies in the affordable batch fabrication of micron-sized cylindrical ion trap arrays, which is hindered by signal intensity reduction and the complexity of achieving stable, crack-free structures in extreme miniaturization.
Innovation Solution
The method involves using Low Temperature Co-fired Ceramics (LTCC) to fabricate cylindrical ion trap ring electrodes through lamination, firing, and metallization, allowing for the creation of stable and accurate CITs with precise control over shrinkage and cracking, and subsequent photolithographic patterning for conductive areas, enabling batch fabrication of miniature mass spectrometers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If extreme miniaturization of mass spectrometers is pursued, then the device size and power consumption are reduced, but the signal intensity decreases and manufacturing complexity increases
Solution Approach 1:
The invention divides the mass spectrometer into multiple functional modules (ion source, ion trap, detector) that can be independently optimized and manufactured. The ion trap itself is segmented into multiple electrodes with specific geometries that enhance ion confinement efficiency, compensating for the reduced signal intensity through improved ion trapping mechanics rather than increased size.
Solution Approach 2:
The patent employs composite material structures in the ion trap electrodes, combining conductive materials with structurally optimized geometries. The use of multi-layer electrode constructions and specialized coating materials enhances the interaction efficiency between electric fields and ions, thereby improving signal intensity without requiring larger device dimensions.
2Productivity
If batch fabrication of micron-sized cylindrical ion trap arrays is attempted, then productivity increases, but manufacturing precision and structural stability become difficult to maintain
Solution Approach 1:
The invention incorporates preliminary design features in the ion trap structure, such as pre-calculated electrode geometries and pre-determined material specifications, that ensure structural stability is built into the fabrication process from the outset. The patent provides detailed design guidelines for electrode dimensions and arrangements that maintain precision across batch production.
Solution Approach 2:
The patent systematically varies key fabrication parameters (electrode thickness, spacing, material composition) to optimize both manufacturability and structural stability. By establishing parameter ranges and tolerance specifications, the invention enables batch fabrication while maintaining consistent structural quality across multiple devices.
3Ease of manufacture
If conventional fabrication methods are used for ion traps, then ease of manufacture is maintained, but the ability to achieve complex three-dimensional structures is limited
Solution Approach 1:
The invention transitions from conventional two-dimensional electrode layouts to three-dimensional ion trap structures with electrodes positioned in multiple spatial dimensions. This enables complex electric field configurations that improve ion confinement and manipulation capabilities while still using standard fabrication techniques adapted for 3D geometries.
Solution Approach 2:
The patent implements nested electrode structures where smaller electrodes are positioned within or between larger electrodes, creating multi-layer three-dimensional configurations. This nesting approach allows complex 3D structures to be built using sequential fabrication steps that remain compatible with conventional manufacturing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in the successful operation of miniature CIT mass spectrometers capable of detecting chemicals like chloroform and perfluorotributylamine, achieving mass spectra with a typical peak width of 1.8 m/z and enabling cost-effective, high-resolution chemical analysis.
Implementation Method 1
Upon firing the organic compounds are volatilized and at 800°-850° C. the glass in the ceramic reflows to impart rigidity to the structure.
Implementation Method 2
As the organics are volatilized, the structure shrinks. This shrinkage is a function of the lamination pressure (compaction) and firing cycle.
Implementation Method 3
Upon firing the organic compounds are volatilized and at 800°-850° C. the glass in the ceramic reflows to impart rigidity to the structure.
Implementation Method 4
The fired ring was subjected to a three-dimensional lithography process that enabled metallization for completion of the ring electrode.
Implementation Method 5
areas to be metallized are patterned photolithographically after the substrate is subjected to electroless plating.
Data Source
AI summary
A die assembly for creating a ring electrode including a cylindrically-shaped die base, two die walls and a die top sized to fit inside a cylindrical die housing. The die base and die top having a series of concentric elevations used as impressions to form on two ends of the ring electrode. A method of fabricating an LTCC ring electrode using the die assembly is also provided.