LTCC Microfluidic Packaging via Layer Stacking

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Solution Overview

Problem

The packaging of microfluidic devices and systems poses challenges such as protecting the devices from environmental damage, preventing leakage, enabling fluidic and electrical connectivity, matching thermal expansion coefficients, and achieving low cost, high reliability, and ease of customization, which have hindered their commercialization.

Innovation Solution

The use of low-temperature co-fired ceramic (LTCC) technology for packaging, which involves stacking and firing individually patterned ceramic layers to create composite modules with fluidic channels, electrical connections, and active devices, offering flexibility, low cost, and high performance, including reduced pneumatic capacitance for faster response.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If conventional packaging methods are used for microfluidic devices, then the devices can be protected from environmental damage, but the packaging introduces thermal expansion mismatches and adds complexity to the system

Engineering Contradiction:
Improveenvironmental damage protectionVSAvoidpackaging structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent combines the packaging function with the device substrate itself by integrating the microfluidic device directly onto the LTCC package substrate. The LTCC substrate serves dual purposes as both the structural platform for the microfluidic device and the packaging material, eliminating the need for separate packaging components and reducing thermal expansion mismatch issues.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses low-temperature co-fired ceramic (LTCC) material which is a composite ceramic-polymer material. This composite material provides both the mechanical protection needed for device packaging and has thermal expansion properties that better match the microfluidic device components, reducing thermal stress while maintaining protection.

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If conventional packaging methods are used for microfluidic devices, then the devices can be protected, but achieving leak-free fluidic connections becomes more difficult and costly

Engineering Contradiction:
Improveprotection from environmentVSAvoidease of customization
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent incorporates fluidic pathways and connection features directly into the LTCC substrate during the packaging fabrication process itself, before the microfluidic device is assembled. This preliminary integration of fluidic connections into the package structure eliminates the need for post-assembly sealing operations and ensures leak-free connections from the outset.

Inventive Principle:
Principle #10Preliminary action

3Object-affected harmful factors

If conventional packaging methods are used for microfluidic devices, then the devices can be protected, but the pneumatic response time is slowed due to increased pneumatic capacitance

Engineering Contradiction:
Improveprotection from environmentVSAvoidpneumatic response speed
Core Design Contradiction:
Object-affected harmful factorsVSSpeed

Solution Approach 1:

The patent utilizes the third dimension (vertical depth) of the LTCC substrate to create compact, three-dimensional fluidic pathways and pneumatic channels. This vertical integration reduces the overall volume of pneumatic capacitance compared to conventional planar packaging, thereby improving pneumatic response speed while maintaining protective enclosure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides reliable, leak-free, and customizable packaging that protects microfluidic devices, allows for efficient fluidic and electrical connectivity, matches thermal expansion coefficients, and reduces development costs, enhancing the performance and applicability of microfluidic systems in various fields.

Implementation Method 1

The first and second packaging modules may be exposed to an elevated temperature to transition the LTCC green tape to a stable form of LTCC ceramic material

Methodology Applied
Scientific EffectSintering: Sintering

Data Source

PatentUS11926522B1Packaging of microfluidic devices and microfluidic integrated systems and method of fabrication
Publication Date: 2024.03.12 CORP FOR NATIONAL RESEARCH INITIATIVES
  • US11926522B1 patent drawing
  • US11926522B1 patent drawing
  • US11926522B1 patent drawing

AI summary

A package and method of packaging for integrated microfluidic devices and systems is disclosed wherein a package is made from individually processed and patterned layers of LTCC green tape, that is aligned and stacked, and then co-fired to form a stable LTCC ceramic packaging modules. Subsequently, microfluidic device die and/or integrated microfluidic systems device die are bonded to pre-determined areas of the packaging modules and the modules are aligned bonded together to form leak-free, sealed packages for the microfluidic devices and systems. The use of LTCC materials and techniques provides a low-cost flexible and easily customizable packaging approach for microfluidic devices and systems that can be designed and transitioned into production with significant development time and cost.