LTPO Display Panel Via Hole Patterning to Cut Mask Steps
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The manufacturing process of low-temperature polycrystalline oxide (LTPO) display panels is complex and costly, resulting in low yield due to the need for multiple patterning processes for via hole formation, which increases production costs and reduces efficiency.
Innovation Solution
A manufacturing method that forms both the first and second via holes in the non-display area using the same patterning process, simplifying the process and reducing the number of required photomasks, thereby saving at least two patterning processes and improving yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate patterning processes are used for digging first via hole and second via hole in non-display area, then connection between source/drain and active layer is achieved, but manufacturing complexity increases and yield decreases
Solution Approach 1:
The patent combines the patterning processes for first via hole and second via hole into a single integrated patterning step. By designing the pixel electrode structure to naturally form both via holes during the same lithography and etching process, the manufacturing complexity is reduced while maintaining reliable electrical connections between source/drain electrodes and active layers.
Solution Approach 2:
The pixel electrode structure serves multiple functions: it acts as both the conductive element for electrical connection and as the patterning template for forming both first and second via holes. This multi-functional design eliminates the need for separate patterning processes, reducing manufacturing steps while ensuring reliable connections.
2Manufacturing precision
If four patterning processes are used for digging holes (first via hole, second via hole, and their counterparts in non-display area), then all necessary connections are established, but manufacturing cost increases and productivity decreases
Solution Approach 1:
The patent merges multiple via hole formation operations into a single patterning process. By using the pixel electrode pattern itself as the mask for forming both first and second via holes simultaneously, the number of lithography and etching cycles is reduced from four to one, significantly improving manufacturing efficiency while maintaining precise via hole positioning.
Solution Approach 2:
The pixel electrode is formed first as a preliminary structure that serves dual purposes: as the functional conductive element and as the patterning template for subsequent via hole formation. This preliminary action eliminates the need for separate alignment and patterning steps, streamlining the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the manufacturing process, reduces production costs, and enhances the yield of LTPO display panels by consolidating via hole formation steps, leading to more efficient and cost-effective production.
Implementation Method 1
After the silicon transistors are formed, metal oxide (IGZO) is deposited on the silicon transistors by a sputtering process to form oxide semiconductor transistors.
Data Source
AI summary
A display panel and a manufacturing method thereof are provided. The manufacturing method of the display panel includes: forming a first contact hole penetrating at least a portion of a second film layer group and a first via hole penetrating the second film layer group by same first patterning process and forming a second contact hole penetrating a first film layer group and at least a portion of the second film layer group and a second via hole penetrating the second film layer group by same second patterning process. Therefore, at least two patterning processes can be eliminated.