LTPS Array Substrate Integrating Touch Signal and Electrodes
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Solution Overview
Problem
The manufacturing process of low-temperature poly-silicon (LTPS) thin film transistor array substrates is complex, requiring numerous film layers and photomasks, which prolongs the production cycle.
Innovation Solution
A simplified manufacturing method for the array substrate that reduces the number of photomask processes by integrating key components like touch signal lines, source, and drain electrodes in fewer layers, using a specific layering and via structure, and employing lightly and heavily doped regions in the active layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional manufacturing methods are used for LTPS thin film transistor array substrate, then the substrate requires more film layers and photomasks to ensure proper functionality, but this increases the device complexity and prolongs the production cycle
Solution Approach 1:
The patent combines the touch signal line, source electrode, and drain electrode into the same conductive layer, reducing the number of separate photomask processes required. This merging of functions into a single layer structure directly reduces manufacturing complexity while maintaining device functionality.
Solution Approach 2:
The conductive layer serves multiple functions simultaneously: it acts as the touch signal line for touch sensing, the source electrode for transistor operation, and the drain electrode for current flow. This multi-functionality reduces the number of separate components and manufacturing steps needed.
2Manufacturing precision
If traditional manufacturing methods are used for LTPS thin film transistor array substrate, then the substrate requires more photomask processes to ensure proper layer formation, but this increases the loss of time in production
Solution Approach 1:
By combining multiple electrode functions into a single conductive layer formed by one photomask process, the patent reduces the total number of photomask steps from traditional multi-step processes to fewer integrated steps, directly reducing production time while maintaining precision.
Solution Approach 2:
The conductive layer is designed to pre-establish multiple functional connections (touch signal line, source, and drain electrodes) in a single formation step, eliminating the need for subsequent separate photomask processes to create these individual components.
3Productivity
If the touch signal line, source electrode, and drain electrode are integrated in the same layer, then the production cycle is shortened, but the manufacturing precision requirements increase
Solution Approach 1:
The integration of touch signal line, source electrode, and drain electrode into a single conductive layer formed by one photomask process improves productivity by reducing the number of manufacturing steps. The design accepts that this single process must achieve higher pattern formation accuracy compared to traditional multi-step processes.
Data Source
AI summary
The invention provides an array substrate, a manufacturing method thereof and a display panel. The array substrate includes a substrate, a buffer layer, an active layer, a first insulating layer, a gate electrode, a second insulating layer, a touch signal line, a source and drain electrode, a touch signal line, a source and drain electrode, a first electrode, a planarization layer, and a second electrode. The first electrode and the second electrode are respectively connected to one of the drain electrode and the touch signal line. Thus, photomask processes can be reduced, and production cycle can be shortened.