Multi-Channel Spectrometer for Luminescence Angular Resolution

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Solution Overview

Problem

Conventional spectrometers are limited in their ability to detect the wavelength spectrum of luminescence light with angular resolution, often requiring integral detection that provides only qualitative results and neglecting the valuable information in the zeroth diffraction order, while also being prone to disruptions from environmental changes that necessitate frequent referencing, interrupting the measurement process.

Innovation Solution

A device comprising a particle-optical system with a primary particle beam source, such as a scanning electron microscope or ion microscope, that focuses the beam onto a sample to generate luminescence, and a multi-channel spectrometer setup with light receiving elements covering various solid angles, allowing for simultaneous detection and analysis of photons across different trajectories, including the utilization of the zeroth diffraction order without performance loss, and real-time referencing to minimize measurement interruptions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If conventional spectrometers use integral detection to detect luminescence light, then the detection process is simple, but only qualitative results are obtained and quantitative spectral analysis is lost

Engineering Contradiction:
Improvedetection process simplicityVSAvoidspectral analysis quality
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The detection system is segmented into multiple independent detection channels, each capable of detecting luminescence light in specific wavelength ranges or from specific angular directions. This segmentation enables simultaneous quantitative spectral analysis while maintaining operational simplicity through parallel processing of multiple signals.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system transitions from one-dimensional integral detection to multi-dimensional detection by adding angular resolution and wavelength dispersion dimensions. Light is detected not only by intensity but also by its angular distribution and spectral composition, enabling quantitative analysis while maintaining ease of operation through automated multi-parameter measurement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If conventional spectrometers suppress the zeroth diffraction order to prevent interfering influences, then measurement accuracy is improved, but valuable spectral information is lost

Engineering Contradiction:
Improvespectrometric measurement accuracyVSAvoidspectral information from zeroth order
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

An intermediary detection system is introduced that can distinguish between the zeroth diffraction order light and other interfering light. By using angular resolution and spectral dispersion, the system separates the zeroth order signal from interfering influences, allowing simultaneous measurement of spectral information and maintenance of measurement accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system creates multiple copies of the light signal through parallel detection channels, one for the zeroth diffraction order and others for dispersed wavelengths. This copying allows the zeroth order information to be preserved and analyzed alongside other spectral data without compromising measurement accuracy.

Inventive Principle:
Principle #26Copying

3Reliability

If conventional spectrometers perform continuous recalibration to compensate for environmental changes, then measurement reliability is maintained, but measurement time is interrupted

Engineering Contradiction:
Improvemeasurement stability under environmental changesVSAvoidmeasurement interruption time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs preliminary characterization of environmental influences and incorporates compensation parameters into the measurement setup in advance. By pre-calculating and pre-compensating for environmental changes, the system maintains measurement reliability without requiring continuous interruptions for recalibration.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements continuous feedback monitoring of environmental parameters and automatically adjusts measurement parameters in real-time. This feedback mechanism maintains measurement reliability under changing environmental conditions while avoiding measurement interruptions by performing compensation during continuous operation.

Inventive Principle:
Principle #23Feedback

4Productivity

If light-receiving elements are arranged to capture the largest possible solid angle, then photon detection efficiency is improved, but angular resolution is reduced

Engineering Contradiction:
Improvephoton detection efficiencyVSAvoidangular resolution
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The detection system segments the solid angle into multiple directional channels, each with its own light-receiving element. This segmentation allows simultaneous capture of photons from all directions (maintaining high detection efficiency) while preserving angular information through the directional characteristics of each channel.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system adds the dimension of angular information to the detection process by measuring not only the intensity of light from different solid angles but also the directional characteristics. This multi-dimensional detection enables simultaneous high photon detection efficiency and high angular resolution through parallel measurement of intensity and direction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the detection of luminescence light with angular and spatial resolution, providing detailed spectral analysis and kinetic information, while maintaining continuous measurement and utilizing previously unused radiation components, thereby enhancing the accuracy and efficiency of luminescence analysis.

Implementation Method 1

Luminescence is the emission of light, i.e., electromagnetic radiation with wavelengths in the visible or adjacent wavelength range (infrared and ultraviolet). To observe luminescence, a material with luminescent properties is excited to emit light.

Methodology Applied
Scientific EffectLuminescence: Luminescence

Implementation Method 2

In the case of excitation by photons, such as with UV light, the phenomenon is called photoluminescence.

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Implementation Method 3

Luminescence is referred to as cathodoluminescence (KL) when the light emission is excited by the impact of electrons that were previously emitted from a cathode and accelerated in an electric field.

Methodology Applied
Scientific EffectCathodoluminescence: Cathodoluminescence

Implementation Method 4

A prism or a grating can serve as the dispersing element. As the light to be analyzed passes through the dispersing element, the spectral components of the light are deflected in different directions: this creates a spectrum

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentEP3392650B1Device for spectroscopic analysis
Publication Date: 2022.08.31 CARL ZEISS MICROSCOPY GMBH
  • EP3392650B1 patent drawingFigure 1
  • EP3392650B1 patent drawingFigure 2
  • EP3392650B1 patent drawingFigure 3

AI summary

The present invention relates to devices for the spectrometric analysis of light-emitting samples, comprising an imaging grating arranged such that photons released from the sample are dispersed and a detector that detects the spectrum generated by dispersion.