Luminescent Sputtering Target for Separator Coating Lifespan Detection
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Solution Overview
Problem
Existing technologies face challenges in accurately detecting the lifespan of sputtering targets and timing their replacement in electrochemical apparatuses, leading to instability and defects in the coating layer of separators.
Innovation Solution
A sputtering target with a luminescent layer and a target layer is used in a separator processing device, allowing for visual detection of the target's lifespan by exposing luminescent elements when the target is consumed, thus enabling timely replacement without expensive analysis devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a sputtering target is used for coating separators in electrochemical apparatus, then the coating quality and performance of the separator can be improved, but it becomes difficult to accurately detect the lifespan of the sputtering target and determine the timing of replacement
Solution Approach 1:
The patent applies color change principle by forming a gradient color pattern on the sputtering target surface during the coating process. The color varies from the center to the edge of the target, allowing visual detection of the target's usage state and lifespan without requiring complex analysis devices. When the target is consumed, the color pattern changes, providing a simple visual indicator for replacement timing.
2Measurement precision
If expensive analysis devices are used to detect the lifespan of the sputtering target, then the detection accuracy can be improved, but the cost and device complexity increase
Solution Approach 1:
The sputtering target itself serves as the detection indicator through its gradient color pattern. The target's own visual characteristics provide information about its lifespan and usage state, eliminating the need for separate expensive analysis devices. The target essentially detects its own state through the visual color gradient that changes as it is consumed.
3Productivity
If the sputtering target is used for an extended period to increase productivity, then the output can be improved, but coating defects and instability occur due to target consumption
Solution Approach 1:
The gradient color pattern is prepared in advance on the sputtering target during manufacturing. This preliminary visual indicator system allows operators to monitor target consumption and plan replacement before coating quality deteriorates, ensuring consistent coating stability throughout the target's useful life and preventing defects associated with overused targets.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves the stability and reliability of the sputtering process, allows for accurate visual detection of the target's lifespan, and minimizes coating defects, thereby enhancing the efficiency and cost-effectiveness of the process.
Implementation Method 1
a sputtering target provided on the vacuum chamber and including target elements and luminescent elements that are configured to be deposited on the separator
Implementation Method 2
the sputtering target may include a luminescent layer comprising the luminescent elements
Data Source
AI summary
Provided is a separator processing device for an electrochemical apparatus, the separator processing device including a vacuum chamber, a susceptor provided in the vacuum chamber and configured to allow a separator to be seated thereon, and a sputtering target provided on the vacuum chamber and including target elements and luminescent elements that are to be deposited on the separator, thereby obtaining an advantageous effect of accurately detecting the lifespan of the sputtering target and the timing of replacement of the sputtering target.