Semiconductor Macro Cell Trench Layout for Area-Efficient Connectivity
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Solution Overview
Problem
Existing semiconductor devices, such as IGBTs, face challenges in optimizing their operating parameters, particularly in the arrangement and orientation of trenches on the semiconductor substrate, which affects electrical connectivity and area efficiency.
Innovation Solution
The semiconductor device incorporates a transistor with macro cells having trenches oriented in different directions, with connection trenches allowing electrical connection between macro cells, reducing area consumption and improving connectivity through a checkerboard or fishbone pattern arrangement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If trenches in all macro cells are oriented in the same direction, then manufacturing process is simpler, but area consumption increases and electrical connectivity is reduced
Solution Approach 1:
The device is divided into macro cells with different trench orientations (first direction and second direction), allowing the structure to be segmented into functional units that can be independently optimized. This segmentation enables better area utilization while maintaining manufacturing simplicity through standardized cell designs.
Solution Approach 2:
Adjacent macro cells are designed with asymmetric trench orientations relative to each other, where one cell has trenches in the first direction and its neighbor has trenches in the second direction. This asymmetric arrangement reduces the overall device area while maintaining ease of manufacture through systematic variation of a standardized cell pattern.
2Ease of manufacture
If trenches in all macro cells are oriented in the same direction, then manufacturing process is simpler, but electrical connectivity between macro cells is reduced
Solution Approach 1:
The device is divided into macro cells with different trench orientations (first direction and second direction), allowing the structure to be segmented into functional units that can be independently optimized. This segmentation enables better area utilization while maintaining manufacturing simplicity through standardized cell designs.
Solution Approach 2:
Adjacent macro cells are designed with asymmetric trench orientations relative to each other, where one cell has trenches in the first direction and its neighbor has trenches in the second direction. This asymmetric arrangement reduces the overall device area while maintaining ease of manufacture through systematic variation of a standardized cell pattern.
3Area of stationary object
If macro cells are arranged with different trench directions, then area consumption is reduced, but device complexity increases
Solution Approach 1:
The device is divided into macro cells with different trench orientations (first direction and second direction), allowing the structure to be segmented into functional units that can be independently optimized. This segmentation enables better area utilization while maintaining manufacturing simplicity through standardized cell designs.
Solution Approach 2:
Adjacent macro cells are designed with asymmetric trench orientations relative to each other, where one cell has trenches in the first direction and its neighbor has trenches in the second direction. This asymmetric arrangement reduces the overall device area while maintaining ease of manufacture through systematic variation of a standardized cell pattern.
Data Source
AI summary
A semiconductor device includes a transistor having macro cells. A plurality of the macro cells include a first macro cell and a second macro cell. Each first and second macro cell includes trenches formed in a first main surface of a semiconductor substrate. The trenches pattern the semiconductor substrate into mesas and include a conductive trench, with a conductive material in the conductive trench being electrically connected to a terminal. A majority of all trenches of the first macro cell exclusively run in a first direction. A majority of all trenches of the second macro cell exclusively run in a second direction different from the first direction. At least one first macro cell is arranged adjacent to at least one second macro cell.