Maglev Carrier Identification and Weighing for Clean Substrate Transfer

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Solution Overview

Problem

Conventional substrate transfer systems in semiconductor processing face challenges with particle generation, large footprint, and limited throughput due to mechanical robots and conveyors, which affect product quality and production yield.

Innovation Solution

Implementing a magnetic levitation actuator assembly to transport carriers between process stations, using a membrane to isolate vacuum environments and eliminate mechanical contact, allowing for reduced particle generation, smaller footprint, and increased throughput.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional mechanical robots are used for substrate transfer, then substrates can be moved between process chambers, but particle generation increases and footprint becomes large

Engineering Contradiction:

Improvesubstrate transfer capabilityVSAvoidparticle generation

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces conventional mechanical robots with a magnetic field-based transfer system. Electromagnets mounted on the robot arm interact with ferromagnetic carriers to transfer substrates without mechanical contact, eliminating particle generation from mechanical components while maintaining substrate transfer capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces ferromagnetic carriers as intermediaries between the electromagnetic transfer system and substrates. The carriers are attracted to the electromagnets and transported through the vacuum chamber, serving as a mediator that eliminates the need for direct mechanical contact between the robot arm and substrates

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If conventional mechanical robots are used for substrate transfer, then substrates can be moved between process chambers, but the footprint of the central region becomes large

Engineering Contradiction:

Improvesubstrate transfer capabilityVSAvoidfootprint of central region

Core Design Contradiction:

ProductivityVSArea of stationary object

Solution Approach 1:

The electromagnetic transfer system requires less space than mechanical robots because it eliminates the need for large rotating joints and mechanical arms. The electromagnets can be mounted on a more compact moving platform that travels along rails within the vacuum chamber

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from a mechanical rotation-based transfer system to a linear rail-based system operating in a different spatial dimension. The electromagnetic carrier travels along predetermined rails rather than rotating mechanically, reducing the footprint of the central transfer region

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Productivity

If conventional conveyors are used in linear substrate transfer systems, then substrates can be transported between process chambers, but particle generation increases and maintenance requirements increase

Engineering Contradiction:

Improvesubstrate transport capabilityVSAvoidparticle generation

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces mechanical conveyors with an electromagnetic field-based transport system. Ferromagnetic carriers are attracted and transported by electromagnets mounted on a moving robot arm, eliminating particle generation from conveyor belts and mechanical friction while reducing maintenance requirements

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Magnetic levitation reduces particle contamination, minimizes system costs, and enhances throughput by up to 50% compared to conventional systems, facilitating efficient substrate processing.

Implementation Method 1

supplying a current to a plurality of stators of a substrate station to levitate a carrier of a plurality of carriers in a vertical position within a transport region within the substrate station

Methodology Applied

Scientific EffectMagnetic levitation: Maglev

Data Source

PatentUS20260005051A1Identifying and weighing carriers in a substrate processing system

Publication Date: 2026.01.01 APPLIED MATERIALS INC

AI summary

A method and apparatus for identifying of a carrier of a group of carriers within a substrate processing system, wherein the carriers are conveyed by magnetic levitation through the substrate processing system. The carrier may be identified, for example, using an identification element of the carrier, at least two magnets on the carrier spaced apart by an identification distance, a weight of the carrier, a weight of a weighed feature of the carrier, or by the weight and location of a weighted feature of the carrier. Additionally, a method and apparatus for weighting the carrier in a station of the substrate processing system.