Maglev Substrate Carrier Alignment for Fixed-Mask Deposition
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Solution Overview
Problem
Existing in-line type deposition apparatuses face challenges in achieving high-accuracy alignment of glass substrates and masks due to positional changes during transport, requiring prolonged alignment times, especially when multiple deposition chambers are involved.
Innovation Solution
An alignment apparatus and method utilizing a transport mechanism with a transport carrier and alignment chamber, where magnetic forces controlled by coils and magnets adjust the position of the transport carrier to align the substrate and mask with high precision, enabling accurate positioning without additional alignment means.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the mask is disposed in a fixed manner in the deposition part, then the apparatus structure is simplified, but alignment accuracy between substrate and mask deteriorates due to position changes during transport
Solution Approach 1:
The patent replaces mechanical alignment adjustment mechanisms with a magnetic field-based positioning system. Coils generate magnetic forces to levitate and precisely position the transport carrier holding the substrate, eliminating the need for complex mechanical alignment adjustments while achieving high positioning accuracy during transport to the fixed mask
Solution Approach 2:
The patent changes the physical state of the transport carrier from contact-based mechanical support to magnetic levitation. By controlling the magnetic field parameters through the coils, the system achieves precise positional control of the substrate without mechanical contact, thereby maintaining alignment accuracy while simplifying the overall apparatus structure
2Device complexity
If alignment is performed after substrate transport to the deposition part, then the apparatus configuration is simplified, but alignment time increases particularly when there are multiple deposition chambers
Solution Approach 1:
The patent performs preliminary positioning of the substrate using magnetic levitation during the transport process itself, before the substrate reaches the deposition chamber. This preliminary alignment action occurs continuously during transport, eliminating the need for separate post-transport alignment procedures and reducing total alignment time across multiple deposition chambers
3Object-affected harmful factors
If magnetic levitation is used to transport substrate, then dust and particle generation is prevented, but the apparatus requires additional magnetic control components
Solution Approach 1:
The patent designs the coil system to serve multiple functions simultaneously: it generates magnetic forces for levitation to prevent dust and particle generation, and also generates magnetic forces for precise positioning and alignment of the substrate. This multi-functionality reduces the need for separate magnetic control components, thereby limiting the increase in apparatus complexity while achieving the benefit of dust-free transport
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates high-accuracy alignment of substrates and masks, reducing alignment time and simplifying the apparatus configuration while preventing dust and particle generation, thereby ensuring high-quality film deposition.
Implementation Method 1
a lateral magnetic levitation bearing is used to transport a substrate in the deposition part
Implementation Method 2
control means which applies a current or a voltage to a plurality of coils disposed in one of the transport carrier and each transport module to control a magnetic force generated between the plurality of coils and a plurality of magnets disposed in the other one
Data Source
AI summary
An alignment apparatus includes: a transport mechanism including a transport carrier which holds and transports a substrate and transport modules which constitute a transport path through which the transport carrier moves; an alignment chamber in which a mask is positioned and fixed to the substrate held by the transport carrier and loaded by the transport mechanism; and control means which applies a current or a voltage to a plurality of coils disposed in one of the transport carrier and each transport module to control a magnetic force generated between the plurality of coils and a plurality of magnets disposed in the other one of the transport carrier and the transport module, wherein the control means adjusts the position of the transport carrier in a state in which the transport carrier holding the substrate has been levitated by controlling the magnetic force to perform positioning.