Magnetic Levitation Conveyor for Organic Layer Deposition
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Solution Overview
Problem
Existing organic light-emitting display devices face challenges in achieving high light-emission efficiency due to their stacked structure, requiring additional intermediate layers, and there is a need for an apparatus that can efficiently manufacture large-size display devices with improved yield and deposition efficiency.
Innovation Solution
An organic layer deposition apparatus featuring an electrostatic chuck, a vacuum chamber, and conveyor units with magnetic levitation bearings for precise movement and non-contact deposition, allowing for the deposition of organic layers with relative motion between the substrate and the deposition assembly, enabling the formation of large-size active matrix organic light-emitting display devices with non-uniform thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a stacked structure with intermediate layers is used to improve light-emission efficiency, then light-emission efficiency is improved, but device complexity increases
Solution Approach 1:
The patent extracts and eliminates the need for multiple intermediate layers (electron injection layer, electron transport layer, hole transport layer, hole injection layer) by using a novel deposition apparatus that enables direct deposition of functional organic layers. This simplifies the stacked structure while maintaining the light-emission efficiency through improved deposition control and uniformity.
Solution Approach 2:
The invention changes the deposition parameters by using a movable substrate or deposition assembly configuration with precise positioning systems. This allows for controlled variation in deposition conditions, enabling high-quality organic layer formation without requiring multiple intermediate layers, thus improving light-emission efficiency while reducing device complexity.
2Ease of manufacture
If traditional deposition methods are used for manufacturing large-size display devices, then manufacturing process is simple, but productivity is low
Solution Approach 1:
The patent introduces dynamic elements to the deposition system by making either the substrate or the deposition assembly movable during the deposition process. This dynamic configuration enables continuous deposition across large-area substrates, significantly improving productivity for large-size display device manufacturing while maintaining process simplicity through automated motion control.
Solution Approach 2:
The invention implements continuous deposition action by allowing the substrate or deposition assembly to move during the process, eliminating idle time and enabling uninterrupted material deposition. This continuous operation mode dramatically increases productivity for large-size display devices while keeping the manufacturing process straightforward through automated continuous processing.
3Productivity
If the substrate or deposition assembly is moved during deposition, then deposition efficiency is improved, but manufacturing precision requirements increase
Solution Approach 1:
The patent replaces traditional mechanical positioning systems with magnetic levitation bearing technology to support and move the electrostatic chuck. This substitution eliminates mechanical contact and friction, enabling highly precise movement control during deposition, thus achieving both high deposition efficiency and the required manufacturing precision simultaneously.
Solution Approach 2:
The invention introduces magnetic fields as an intermediary between the drive unit and the electrostatic chuck, using magnetic levitation bearings to transmit motion without physical contact. This intermediary approach enables smooth, precise movement during deposition, maintaining manufacturing precision while improving deposition efficiency through continuous motion capability.
4Manufacturing precision
If magnetic levitation bearing is used to move electrostatic chuck non-contact, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The patent integrates multiple functions into the magnetic levitation bearing system, which simultaneously provides non-contact support, precise positioning, and motion control for the electrostatic chuck. This multi-functional design achieves high manufacturing precision while minimizing the addition of separate components, thereby controlling device complexity through functional integration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus simplifies the manufacturing process for large-size organic light-emitting display devices, enhances deposition efficiency, and improves yield by allowing for precise and efficient deposition of organic layers, addressing the limitations of traditional methods in achieving high light-emission efficiency.
Implementation Method 1
an electrostatic chuck for holding a substrate
Implementation Method 2
a magnetic levitation bearing for levitating the electrostatic chuck above the receiving member to move without contacting the receiving member
Implementation Method 3
an organic layer deposition assembly for depositing at least one organic layer on the substrate
Data Source
AI summary
An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.