Maglev Mover Attitude Control Using Machine Difference Compensation

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Solution Overview

Problem

Transport systems using linear motors and magnetic levitation face position errors due to machining and assembly errors, which affect the accuracy of workpiece movement in production lines and processing systems.

Innovation Solution

A transport system with a movable mover and a stator having multiple coils that apply force in one direction while levitating the mover in a perpendicular direction, using a control unit to control the current applied to the coils based on machine difference information to manage the attitude of the mover during levitation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a transport system using linear motor or magnetic levitation is used to transport workpieces, then the transport speed and automation level are improved, but position errors occur due to machining and assembly errors of the reading surface

Engineering Contradiction:
Improvetransport speedVSAvoidposition accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system performs preliminary measurement of movement machine difference for each mover using a measuring jig before actual transport operations. Correction values are calculated and stored in advance, then applied during transport to compensate for position errors, thereby maintaining high productivity while achieving accurate positioning.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system changes the parameter of position correction by applying individual correction values to each mover based on its specific movement machine difference. This allows the system to maintain high transport speed while compensating for manufacturing variations in reading surfaces through parameter adjustment rather than mechanical rework.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If correction values are determined for each mover based on movement machine difference, then position accuracy is improved, but the system complexity and measurement requirements increase

Engineering Contradiction:
Improveposition accuracyVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

A common measuring jig is designed to measure multiple movers of different types using the same measurement procedure. This universal measuring approach simplifies the system by eliminating the need for different measurement equipment for each mover type, reducing overall system complexity while maintaining position accuracy.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system creates a digital copy of position correction data (movement machine difference and correction values) for each mover and stores it in the control device. This digital copying approach replaces complex physical adjustment mechanisms, simplifying the system while enabling precise position correction through software-based compensation.

Inventive Principle:
Principle #26Copying

3Ease of manufacture

If a common measuring jig is used to measure multiple movers, then the ease of manufacture and measurement efficiency are improved, but the ability to account for individual mover differences is reduced

Engineering Contradiction:
Improvemeasurement efficiencyVSAvoidindividual mover measurement accuracy
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The measurement process is segmented into two distinct stages: first, a common measuring jig measures each mover individually to capture its specific movement machine difference; second, the control device processes these individual measurements to calculate customized correction values for each mover. This segmentation maintains both measurement efficiency through the common jig and individual measurement accuracy through dedicated measurement of each mover.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system implements feedback by using the measurement results from the common measuring jig to generate individual correction values for each mover. The measured movement machine difference feeds back into the control system, which then applies specific correction parameters to each mover, ensuring individual measurement accuracy is preserved despite using a common measurement device.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the accuracy of workpiece movement by correcting position and attitude errors, allowing for precise control of the mover's position and attitude in six axes, thereby improving the overall efficiency and accuracy of the transport system.

Implementation Method 1

a stator having a plurality of coils arranged in the first direction and configured to apply force to transport the mover in the first direction while using a plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction

Methodology Applied
Scientific EffectElectromagnetic force: Lorentz Force

Data Source

PatentUS12166435B2Transport system, processing system, and article manufacturing method
Publication Date: 2024.12.10 CANON KK
  • US12166435B2 patent drawing
  • US12166435B2 patent drawing
  • US12166435B2 patent drawing

AI summary

A transport system includes a mover, a stator, and a control unit. The mover moves in a first direction. The stator includes a plurality of coils arranged in the first direction and applies force to transport the mover in the first direction while using the plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction. The control unit controls the current applied to the plurality of coils to control operation of the mover. The control unit controls the current applied to the plurality of coils using machine difference information of the mover to control an attitude of the mover while the mover is being levitated.