Double-Layer Winding Maglev Planar Motor for Stable 6-DOF Positioning
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Solution Overview
Problem
Magnetic levitation planar motors experience significant output force fluctuations during motion, leading to poor stability and low positioning precision, which is a challenge in achieving high-precision motion control in semiconductor manufacturing.
Innovation Solution
A magnetic levitation planar motor workbench with a double-layer winding of coarse and fine drive is designed, featuring a stator with a Halbach arrangement of permanent magnets and a mover with unequal height windings, allowing for six-degree-of-freedom motion control by optimizing the magnetic field interaction and reducing force fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a magnetic levitation planar motor uses a single-layer winding structure, then the structure is simple, but the output force fluctuates greatly during motion
Solution Approach 1:
The single-layer winding is divided into two separate layers (first winding layer and second winding layer), each with different height positions. This segmentation allows each layer to contribute differently to the magnetic field generation, reducing the fluctuation of output force during motor operation while maintaining a relatively simple overall structure.
Solution Approach 2:
The invention introduces a height dimension differentiation between the first and second winding layers, creating a three-dimensional winding arrangement. This dimensional change enables the windings to interact with the magnetic field at different positions, smoothing out force fluctuations that occur in single-layer configurations.
2Manufacturing precision
If a magnetic levitation planar motor uses irregular-shaped permanent magnets to optimize magnetic field distribution, then the magnetic field characteristics improve, but the processing difficulty increases and adhesive requirements become more stringent
Solution Approach 1:
The permanent magnets are arranged in an asymmetric Halbach array pattern rather than a symmetric configuration. This asymmetric arrangement optimizes the magnetic field distribution to be more sinusoidal, improving motor performance while the magnets themselves remain simple geometric shapes that are easy to manufacture and assemble.
3Measurement precision
If a magnetic levitation planar motor uses macro-micro drives with multiple actuators, then the motion control precision improves, but the structure becomes complex and manufacturing tolerances affect performance
Solution Approach 1:
The magnetic levitation planar motor uses a unified electromagnetic drive system that performs multiple functions (both coarse and fine motion control) through the dual-layer winding arrangement, eliminating the need for separate macro and micro actuators. This reduces structural complexity while maintaining high motion control precision.
Solution Approach 2:
The invention merges the coarse drive and fine drive functions into a single integrated magnetic levitation motor system. The first and second winding layers work together to provide both large-range positioning and high-precision motion control, consolidating what would traditionally require multiple separate actuators into one unified system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The double-layer winding structure reduces output force fluctuations, enhances motion precision, and provides stable high-precision motion control, suitable for ultra-precision manufacturing applications like semiconductor processing by decoupling the windings to achieve high acceleration and low-precision motion control.
Implementation Method 1
The magnetic levitation planar motor utilizes the Lorentz force generated from the magnetic field of the current-carrying conductor to provide driving force and driving torque
Implementation Method 2
The magnetic levitation planar motor utilizes the Lorentz force generated from the magnetic field of the current-carrying conductor
Implementation Method 3
a plurality of vertically magnetized permanent magnets and a plurality of horizontally magnetized permanent magnets arranged in a groove of the base in a Halbach arrangement
Data Source
AI summary
The disclosure discloses a magnetic levitation planar motor workbench having a double-layer winding of coarse and fine drive, which belongs to the technical field of planar motors, and includes a stator and a mover. The vertically magnetized permanent magnets and the horizontally magnetized permanent magnets in the stator are arranged in a Halbach arrangement; the mover is located on the enhanced side of the air gap magnetic field above the stator. The mover adopts the double-layer winding of unequal heights, and the height of the upper first winding is smaller than the lower second winding. Each layer of winding may generate driving forces in six directions to achieve six-degree-of-freedom driving.