Magnetic Levitation Vacuum Pump Coil Segmentation

Solution Overview

Problem

In magnetic levitation type vacuum pumps, increasing the coil turns to improve magnetic levitation control leads to decreased carrier wave current, making position measurement harder and deteriorating coil characteristics at high frequencies, while reducing coil turns increases power consumption, which is not energy-efficient in semiconductor manufacturing.

Innovation Solution

The magnetic levitation type vacuum pump includes an electromagnet coil with a primary and secondary coil connected in parallel, an interrupting circuit for the carrier wave current, and a capacitor to set specific impedance relationships between the primary and secondary coils, allowing for increased carrier wave current while maintaining magnetic levitation control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the coil turns are reduced to increase carrier wave current, then the carrier wave current increases, but the magnetic levitation force decreases and power consumption increases

Engineering Contradiction:

Improvecarrier wave currentVSAvoidmagnetic levitation force

Core Design Contradiction:

Quantity of substanceVSForce

Solution Approach 1:

The electromagnet coil is segmented into two separate coils: a primary coil dedicated to generating magnetic levitation force and a secondary coil dedicated to carrying the carrier wave signal. This segmentation allows each coil to be optimized for its specific function, resolving the contradiction between carrier wave current and magnetic levitation force.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

An interrupting circuit is introduced as an intermediary component connected in series with the secondary coil. This circuit selectively interrupts the magnetic levitation control current component while allowing the carrier wave current component to pass through, enabling the secondary coil to carry the carrier wave signal without interfering with the primary coil's magnetic levitation function.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Force

If the coil turns are increased to improve magnetic levitation control, then the magnetic levitation force increases, but the carrier wave current decreases and position measurement becomes harder

Engineering Contradiction:

Improvemagnetic levitation forceVSAvoidcarrier wave current

Core Design Contradiction:

ForceVSQuantity of substance

Solution Approach 1:

The electromagnet coil is segmented into two separate coils: a primary coil dedicated to generating magnetic levitation force and a secondary coil dedicated to carrying the carrier wave signal. This segmentation allows each coil to be optimized for its specific function, resolving the contradiction between carrier wave current and magnetic levitation force.

Inventive Principle:

Principle #1Segmentation

3Force

If the coil turns are increased to improve magnetic levitation control, then the magnetic levitation force increases, but the coil characteristics deteriorate at high frequencies

Engineering Contradiction:

Improvemagnetic levitation forceVSAvoidcoil characteristics at high frequencies

Core Design Contradiction:

ForceVSReliability

Solution Approach 1:

The electromagnet coil is segmented into two separate coils: a primary coil dedicated to generating magnetic levitation force and a secondary coil dedicated to carrying the carrier wave signal. This segmentation allows each coil to be optimized for its specific function, resolving the contradiction between carrier wave current and magnetic levitation force.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables increased carrier wave current while minimizing the impact on magnetic levitation control, improving position detection and reducing power consumption by optimizing impedance and frequency relationships.

Implementation Method 1

an electromagnet magnetically levitating the rotor by a magnetic force and having an electromagnet coil wound around a core

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

the interrupting circuit has a capacitor, wherein the inductance of the primary coil is LM, a frequency of the magnetic levitation control current component is f1, a frequency of the carrier wave current component is f2, a capacitance C of the capacitor is set to satisfy an equation

Methodology Applied

Scientific EffectCapacitance: Capacitance

Data Source

PatentUS9065309B2Magnetic levitation type vacuum pump and magnetic levitation device

Publication Date: 2015.06.23 SHIMADZU CORP

AI summary

A magnetic levitation type vacuum pump includes an electromagnet magnetically levitating a rotor by a magnetic force, an electromagnet driving circuit supplying an electromagnet current including a magnetic levitation control current component and a carrier wave current component having a frequency band higher than the magnetic levitation control current component to the electromagnet coil, a levitated position detecting circuit detecting the carrier wave current component and generating a levitated position signal of the rotor, a magnetic levitation control circuit inputting a current command of the magnetic levitation control current component to the electromagnet driving circuit based on the levitated position signal. The electromagnet coil has a primary coil and a secondary coil connected in parallel with the primary coil. An interrupting circuit connected in series with the secondary coil for the carrier wave current component passing therethrough and interrupting the magnetic levitation control current component is further included.