Maglev Vacuum Pump Control for Disturbance Suppression and Fast Stop

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Solution Overview

Problem

Conventional turbo molecular pumps face challenges in achieving accurate and stable control during operation, are susceptible to disturbances, and have long pump stop times due to the use of multiple power supplies and amplifier circuits, which hinder size reduction and power savings.

Innovation Solution

A vacuum pump system with a single amplifying means driven by direct-current power, utilizing high-rigidity and low-rigidity mode adjustments, and a high-bias mode to manage current signals, eliminating the need for a regenerative resistor and allowing for quick disturbance suppression and reduced braking time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple power supplies and amplifier circuits are used for high-speed control during resonance passage, then disturbance suppression capability is improved, but device size and power consumption increase

Engineering Contradiction:
Improvedisturbance suppression capabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple power supplies and amplifier circuits into a single integrated amplifier circuit that can output multiple voltage levels (±15V and ±50V). This consolidation maintains the capability to provide high-speed current changes during resonance passage while eliminating redundant components, thereby reducing device size and power consumption without compromising disturbance suppression capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single amplifier circuit is designed to perform multiple functions by providing different voltage outputs (±15V for normal operation and ±50V for high-speed control during resonance). This multi-functional design allows the system to adapt to different operational requirements using a single component, reducing overall system complexity while maintaining reliability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If multiple power supplies and amplifier circuits are used for high-speed control during resonance passage, then disturbance suppression capability is improved, but power consumption increases

Engineering Contradiction:
Improvedisturbance suppression capabilityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by stationary object

Solution Approach 1:

The patent consolidates multiple power supplies into a single power supply system that can generate multiple voltage levels. This merging eliminates the need for separate power supplies, reducing standby power consumption while maintaining the capability to deliver high power during resonance passage for disturbance suppression.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system uses periodic switching between different voltage output modes (±15V and ±50V) based on operational requirements. The amplifier circuit operates at high power only during necessary periods (resonance passage), while consuming minimal power during normal operation, thereby reducing overall power consumption while maintaining disturbance suppression capability when needed.

Inventive Principle:
Principle #19Periodic action

3Speed

If high voltage power supply is used during normal operation, then response speed is improved, but vibration increases

Engineering Contradiction:
Improveresponse speedVSAvoidvibration
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The system dynamically adjusts the amplifier circuit's output voltage level based on operational conditions. During normal operation, it outputs ±15V to minimize vibration, while during resonance passage or disturbance events, it switches to ±50V for high-speed response. This dynamic adaptation allows the system to optimize between response speed and vibration generation in different operational contexts.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables stable and accurate control, reduces size and power consumption, and shortens pump stop times by optimizing current management and eliminating noise-induced delays.

Implementation Method 1

a rotating body supported and floated in the air by an electromagnet

Methodology Applied
Scientific EffectMagnetic levitation: Maglev

Implementation Method 2

a position sensor that detects the radial or axial position of the rotating body

Methodology Applied
Scientific EffectPosition detection:

Implementation Method 3

amplifying means that amplifies the output signals added by the output signal adding means

Methodology Applied
Scientific EffectElectrical amplification: Magnetic Amplifier

Data Source

PatentEP3677785B1Vacuum pump
Publication Date: 2024.09.11 EDWARDS JAPAN
  • EP3677785B1 patent drawingFigure 1
  • EP3677785B1 patent drawingFigure 2
  • EP3677785B1 patent drawingFigure 3

AI summary

A vacuum pump and a controller are provided. The vacuum pump and the controller can perform accurate and stable control during a steady operation, are resistant to disturbance, and achieve a short pump stop time and size reduction. A position deviation calculated by a subtractor is input to the PIDs of three modes. The first PID is a PID controller for a high-bias mode, the second PID is a PID controller for a high-rigidity mode, and the third PID is a PID controller for a low-rigidity mode. The output signal of the third PID is extracted as a change of an indicator current for each clock of a PWM frequency and then the mean value of a change of an indicator current for several clocks is determined in a calculating unit. At this point, a switching control unit performs an operation on whether the mean value of the averaged change of the indicator current is larger than a preset redetermined value and then according to the result, an α value is outputted in the range of 0 to 1 from the switching control unit.