Maglev Reticle Transport Stage for Ultra-Clean Vacuum Handling
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Solution Overview
Problem
Next-generation photolithography systems face challenges in meeting mechanical and environmental requirements for reticle transport, particularly in ultra-clean vacuum environments, as conventional robot manipulators struggle with contamination and dimensional constraints.
Innovation Solution
A magnetically levitated transportation stage is employed for reticle transport, utilizing a linear motor to propel and levitate the stage, eliminating mechanical friction and allowing for a compact, vacuum-compatible system that separates clean and dirty vacuum environments, thereby meeting the stringent requirements of next-generation photolithography systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional robot manipulators are used for reticle transport, then the system can achieve flexible positioning, but the system generates mechanical friction and requires lubrication which contaminates the vacuum environment
Solution Approach 1:
The patent replaces the conventional mechanical robot manipulator system with a magnetic field-based transportation system. The reticle carrier is levitated and positioned using magnetic forces generated by stators, eliminating mechanical contact, friction, and the need for lubrication, thereby preventing vacuum contamination while maintaining positioning flexibility.
Solution Approach 2:
The patent introduces magnetic fields as an intermediary between the stators and the reticle carrier. This magnetic field mediator enables force transmission and positioning control without direct mechanical contact, allowing the system to achieve precise positioning while keeping the vacuum environment clean.
2Stability of the object's composition
If mechanical bearings are used for the transportation stage, then the system achieves stable support, but mechanical friction and lubrication requirements increase power dissipation and complexity
Solution Approach 1:
The patent replaces mechanical bearings with magnetic bearing support. The reticle carrier is suspended and supported by magnetic fields generated by the stators, eliminating mechanical friction and the need for lubrication. This reduces power dissipation while maintaining stable support for the transportation stage.
3Length of stationary object
If a compact transportation system is designed to meet height constraints, then the system fits within dimensional limits, but conventional mechanical systems become overly complex
Solution Approach 1:
The patent uses magnetic field-based actuation and support systems that require fewer mechanical components compared to conventional mechanical systems. The integrated stator structures provide both propulsion and bearing functions, simplifying the overall system architecture while meeting compact height constraints.
Solution Approach 2:
The stators in the patent serve multiple functions simultaneously: they provide magnetic propulsion forces, magnetic bearing support, and positioning control. This multi-functionality reduces the number of separate components needed, simplifying the system while achieving compact dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnetically levitated transportation stage reduces mechanical friction, eliminates the need for lubrication, minimizes power dissipation, and simplifies control, enabling efficient and precise reticle transport within tight dimensional constraints while maintaining ultra-clean vacuum conditions.
Implementation Method 1
A magnetically levitated linear transportation stage is provided
Implementation Method 2
utilizing a linear motor to propel and levitate the stage
Data Source
AI summary
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.