Magnetic Levitation Stage With Integrated 3D Yokes for Fast Positioning
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Solution Overview
Problem
Magnetic levitation stage devices face challenges in achieving high-speed positioning and minimizing leakage magnetic fields due to low natural frequency and vibration issues, particularly in applications like charged particle beam and vacuum apparatuses, where a cantilever-like structure of yokes leads to restricted control bands and difficulties in assembly and maintenance.
Innovation Solution
A stage device with a 3D composite motor structure where yokes for XYZ axes share a common member, integrated and fixed at both ends of the table, allowing for high-speed positioning and reduced leakage magnetic fields by enhancing the natural frequency and reducing vibration, thus improving performance and reliability in charged particle beam and vacuum applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate motors are used for XYZ axes with cantilever-like stators, then contactless support is achieved, but the natural frequency of the stage mechanism is low and high-speed positioning is difficult
Solution Approach 1:
The patent combines the stators of multiple motors into a single integrated stator structure. Instead of using separate motors for each axis with individual cantilever-like stators, the invention merges them into one unified stator that serves multiple motor functions, thereby increasing the natural frequency and enabling high-speed positioning while maintaining contactless support
2Ease of operation
If separate motors are used for XYZ axes, then motor thrust in three axis directions is generated, but the structure is complex and application to charged particle beam apparatus is difficult due to magnetic field variation
Solution Approach 1:
The patent merges multiple motor stators into a single integrated stator structure that generates thrust for all three axes (X, Y, Z directions). This unified structure reduces the number of separate components, simplifies the overall device complexity, and minimizes magnetic field variations that would interfere with charged particle beam apparatus applications
Solution Approach 2:
The integrated stator structure serves multiple functions simultaneously - it acts as the stator for multiple motors and provides magnetic field shielding. This multi-functional design eliminates the need for separate magnetic shields for each axis, further reducing structural complexity while maintaining the ability to generate thrust in three orthogonal directions
3Ease of operation
If separate motors are used for XYZ axes, then motor thrust in three axis directions is generated, but magnetic field leakage occurs and high-speed positioning is restricted
Solution Approach 1:
The patent combines multiple stators into one integrated stator structure that provides unified magnetic field control. This merging eliminates the gaps and interfaces between separate stators that would cause magnetic field leakage, thereby reducing harmful magnetic field emissions while maintaining the capability to generate thrust in three axis directions
Solution Approach 2:
The integrated stator structure simultaneously serves as the actuator for multi-axis thrust generation and as a magnetic field shield. This dual functionality eliminates the need for additional magnetic shielding components, reducing overall device complexity while effectively preventing magnetic field leakage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The 3D composite motor structure enables high-speed positioning with reduced leakage magnetic fields, improving the performance and reliability of charged particle beam and vacuum apparatuses by increasing the natural frequency and minimizing vibration, facilitating easier assembly and maintenance.
Implementation Method 1
a levitation mechanism levitating and positioning the support stage by a magnetic field
Implementation Method 2
a first motor configured to generate thrust in a first direction of the levitation mechanism; a second motor configured to generate thrust in a second direction different from the first direction; and a third motor configured to generate thrust in a third direction different from the first and second directions
Data Source
AI summary
A stage device includes a support stage supporting a target on which positioning is performed and a levitation mechanism levitating and positioning the support stage by a magnetic field. The stage device includes: a first motor configured to generate thrust in a first direction of the levitation mechanism; a second motor configured to generate thrust in a second direction different from the first direction; and a third motor configured to generate thrust in a third direction different from the first and second directions. In the first motor, the second motor, and the third motor, each of yokes on a non-levitation side corresponding to the each of motors shares the same member and is integrated. Each of the yokes that shares the same member and is integrated is disposed at both ends of a table in the second direction and a side of each yoke in the first direction is fixed to the table.