Magnetic Levitation Substrate Carrier for Frictionless Transfer

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Solution Overview

Problem

Conventional substrate transfer apparatuses experience yield reduction and productivity loss due to displacement of the lower carrier bar from the roller, generating large friction forces and adverse effects from particles during the transfer of substrates in semiconductor and flat panel display manufacturing.

Innovation Solution

A non-contact substrate transfer apparatus utilizing magnetic levitation and damper units to maintain the carrier in a horizontal, non-contact status, employing thrust from an upper transfer unit and magnetic levitation to levitate the carrier, with lower and upper damper units controlling the center of gravity to prevent inclination and friction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If substrates are transferred by gluing to a rotating roller, then horizontal transfer is achieved, but large friction force is generated and particles are generated causing yield reduction

Engineering Contradiction:

Improvehorizontal transfer speedVSAvoidfriction force and particles

Core Design Contradiction:

SpeedVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the conventional mechanical roller-based transfer system with a magnetic field-based transfer system. The lower transfer unit generates a magnetic field that interacts with a magnetic member on the carrier to enable contactless horizontal transfer, eliminating friction and particle generation while maintaining transfer speed.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a magnetic field as an intermediary between the lower transfer unit and the carrier. This magnetic field acts as a mediator to transmit force for horizontal transfer without direct mechanical contact, thereby eliminating friction and particle generation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If a lower carrier bar is attached to a roller for transfer, then horizontal movement is enabled, but the carrier bar is displaced from the roller decreasing yield

Engineering Contradiction:

Improvehorizontal transfer capabilityVSAvoidcarrier position stability

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent replaces the mechanical roller-attachment system with a magnetic field-based system. The lower transfer unit generates a magnetic field that interacts with a magnetic member on the carrier, enabling contactless horizontal transfer and eliminating the displacement problem inherent in mechanical roller attachments.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses magnetic force as a counteracting force to balance the carrier's weight and maintain stable positioning. The magnetic field generated by the lower transfer unit provides a counterbalancing force that prevents carrier displacement during horizontal transfer, improving reliability.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

3Object-generated harmful factors

If magnetic levitation is used to levitate the carrier, then friction is minimized, but the carrier may become unstable without proper gravity control

Engineering Contradiction:

Improvefriction forceVSAvoidcarrier stability

Core Design Contradiction:

Object-generated harmful factorsVSStability of the object's composition

Solution Approach 1:

The patent uses the lower damper unit to generate a counterbalancing force that offsets the carrier's weight during magnetic levitation. This counterweight mechanism maintains stable horizontal positioning while the magnetic field eliminates friction, achieving both low friction and high stability.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The patent introduces a magnetic field as an intermediary between the lower transfer unit and the carrier for contactless interaction. This magnetic intermediary enables frictionless levitation while the damper unit provides gravitational counterbalance, achieving stable frictionless transfer.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Minimizes friction and particle generation, ensuring stable and efficient horizontal transfer of substrates by maintaining the carrier in a non-contact state, thereby enhancing productivity and reducing yield loss.

Implementation Method 1

a magnetic levitation module levitating the carrier magnetically

Methodology Applied

Scientific EffectMagnetic levitation: Maglev

Implementation Method 2

a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module

Methodology Applied

Scientific EffectDamping: Damping

Data Source

PatentUS8297196B2Apparatus for transferring substrates

Publication Date: 2012.10.30 LG DISPLAY CO LTD

AI summary

An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.