Maglev Substrate Transfer for High-Vacuum Wafer Handling
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Solution Overview
Problem
Existing substrate transfer devices in semiconductor manufacturing face challenges in maintaining a high vacuum due to gas intrusion from vacuum seals and limited throughput due to movement restrictions of transfer robots.
Innovation Solution
A vacuum transfer device utilizing a flat motor with electromagnetic coils and a current controller, combined with a transfer unit featuring magnetic levitation and a temperature adjusting mechanism, to maintain a high vacuum and enhance throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a transfer robot with articulated arm structure is used, then the substrate can be transferred between chambers, but gas intrusion from vacuum seals reduces vacuum quality and movement limitations decrease throughput
Solution Approach 1:
The patent replaces the mechanical articulated arm transfer robot with a magnetic field-based transfer system. The substrate holder is levitated and driven by electromagnetic coils, eliminating mechanical contacts and vacuum seals that cause gas intrusion. This substitution maintains high vacuum quality while enabling faster, more flexible substrate transfer movements to improve throughput.
Solution Approach 2:
The patent uses electromagnetic fields (a form of field-based physics similar to pneumatic/hydraulic principles) to levitate and drive the substrate holder without mechanical contact. The electromagnetic coils generate magnetic fields that propel the substrate holder along the transfer path, replacing mechanical drive systems and eliminating the need for vacuum seals at moving joints.
2Reliability
If magnetic levitation is used to eliminate vacuum seals, then gas intrusion is prevented, but temperature control of the transfer unit becomes challenging
Solution Approach 1:
The patent introduces a temperature-adjusting mechanism as an intermediary between the electromagnetic coils and the substrate holder. This mechanism includes temperature sensors and heating/cooling elements that actively control the temperature of the substrate holder and surrounding components, compensating for thermal effects caused by electromagnetic coil operation and ensuring stable substrate transfer conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents gas intrusion, maintains a high vacuum, and increases throughput by allowing greater freedom of movement for the transfer unit, while also addressing temperature-related transfer accuracy issues.
Implementation Method 1
a base having a plurality of magnets arrayed therein and configured to magnetically levitate from a surface of the body by a magnetic field generated by supplying power to the electromagnetic coil
Implementation Method 2
by a magnetic field generated by supplying power to the electromagnetic coil
Implementation Method 3
A temperature of the transfer unit is adjusted by controlling the current supplied to the electromagnetic coil by the current controller to stop the magnetic levitation of the base, and bringing the base into contact with a temperature-adjusted portion of the body
Data Source
AI summary
A vacuum transfer device configured to transfer a substrate in a vacuum includes: a flat motor including a body, a plurality of electromagnetic coils arrayed in the body, and a current controller that controls a current supplied to the electromagnetic coil; a transfer unit including a substrate holder configured to hold a substrate, and a base having a plurality of magnets arrayed therein and magnetically levitating from a surface of the body by a magnetic field generated by the electromagnetic coil, and move in a magnetically levitating state thereby moving the substrate holder; and a temperature controller configured to adjust temperature of at least a portion of the body. The temperature of the transfer unit is adjusted by stopping the magnetic levitation of the base by controlling the current supplied to the electromagnetic coil, and bringing the base into contact with a temperature-adjusted portion of the body.