Maglev Substrate Transport Robot for Vacuum Contamination Control

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Solution Overview

Problem

Existing substrate transport robots face challenges in efficiently moving substrates within vacuum environments while minimizing contamination and outgassing, as conventional mechanical contact methods can introduce undesirable particles and gases.

Innovation Solution

A substrate transport apparatus utilizing a magnetic levitation system with electromagnetic actuators to vertically space a device over rails, allowing for horizontal movement without direct physical contact, thereby reducing contamination and outgassing, and incorporating a power coupling system for electrical power transfer and an optical communication system for data transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If conventional mechanical contact methods are used for substrate transport, then reliable power and data transfer can be achieved, but contamination and outgassing increase in vacuum environments

Engineering Contradiction:

ImprovecontaminationVSAvoidsystem complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent replaces mechanical contact systems with a magnetic levitation system that uses electromagnetic fields to suspend and transport substrates. The magnetic bearing system eliminates physical contact between moving parts, thereby preventing contamination and outgassing in vacuum environments while maintaining reliable power and data transfer through inductive coupling and optical communication.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces electromagnetic fields as an intermediary between the transport mechanism and the substrate. The magnetic field serves as the mediating force that enables contactless support and movement, while separate intermediary systems (inductive power transfer, optical communication) handle power and data transfer without mechanical contact.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If mechanical contact methods are used for substrate transport, then device simplicity is maintained, but particle introduction and contamination occur

Engineering Contradiction:

Improveparticle introductionVSAvoidtransport reliability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent substitutes mechanical contact with magnetic field-based support and transport. The magnetic bearing system uses electromagnetic forces to hold and move substrates without physical contact, eliminating the source of particle generation while maintaining transport reliability through precise magnetic field control.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Object-affected harmful factors

If direct physical contact is used for substrate movement, then system complexity is reduced, but contamination and outgassing increase in vacuum environments

Engineering Contradiction:

ImproveoutgassingVSAvoidsystem complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent replaces mechanical contact systems with magnetic levitation technology. The magnetic bearing system uses electromagnetic fields to provide contactless support and transport, eliminating outgassing from mechanical components while managing system complexity through integrated electromagnetic actuation and control.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and contamination-free movement of substrates within vacuum environments by eliminating mechanical contact, reducing particle introduction, and ensuring reliable power and data transfer.

Implementation Method 1

a magnetic system configured to vertically space the first device over the at least two rails with a gap between the first device and the at least two rails

Methodology Applied

Scientific EffectMagnetic levitation: Maglev

Implementation Method 2

the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device

Methodology Applied

Scientific EffectElectromagnetic force: Electromagnet

Implementation Method 3

a linear actuator configured to move the first device in the path along the at least two rails

Methodology Applied

Scientific EffectLinear actuation: Linear Motor

Data Source

PatentUS11964831B2Magnetically guided material handling robot

Publication Date: 2024.04.23 PERSIMMON TECHNOLOGIES CORP

AI summary

An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.