Maglev Substrate Transport Robot for Vacuum Contamination Control
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Solution Overview
Problem
Existing substrate transport robots face challenges in efficiently moving substrates within vacuum environments while minimizing contamination and outgassing, as conventional mechanical contacts on rails and linear bearings can introduce contaminants and require costly low-outgassing designs.
Innovation Solution
A substrate transport apparatus utilizing a magnetic levitation system with electromagnetic actuators to vertically space a device over rails, allowing movement without direct physical contact, and incorporating a power coupling system for induction-based power transfer and optical communication to maintain a sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional mechanical contacts on rails and linear bearings are used for substrate transport, then the robot can move along the rails, but contaminants are introduced and outgassing increases
Solution Approach 1:
The patent replaces the conventional mechanical contact system (rails and linear bearings) with a magnetic levitation system using electromagnetic actuators. The first, second, and third electromagnetic actuators generate magnetic forces to levitate and propel the device along the rails without physical contact, thereby eliminating contamination and outgassing issues associated with mechanical contacts.
Solution Approach 2:
The patent introduces magnetic fields as an intermediary between the device and the rails. The electromagnetic actuators create magnetic fields that interact with the rails to provide both levitation and propulsion, serving as a non-contact mediator that transfers force without mechanical contact, thus preventing contamination.
2Object-affected harmful factors
If mechanical contacts are eliminated using magnetic levitation, then contamination is reduced, but device complexity increases
Solution Approach 1:
The patent designs the electromagnetic actuators to perform multiple functions: the first electromagnetic actuator provides levitation force, the second electromagnetic actuator provides propulsion force, and the third electromagnetic actuator provides additional levitation or stabilization. This multi-functional design reduces the need for separate components, thereby managing complexity while achieving contamination-free operation.
3Stress or pressure
If electromagnetic actuators are positioned at corners and sides of the device, then vertical spacing is achieved, but the third actuator cannot be placed at a corner
Solution Approach 1:
The patent employs an asymmetric arrangement of electromagnetic actuators where the first actuator is at a first corner, the second actuator is at a second corner on the same side, and the third actuator is on the opposite side but not at a corner. This asymmetric positioning optimizes the magnetic field distribution for vertical spacing while avoiding the geometric constraints of corner placement for all actuators.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables contamination-free and efficient substrate transport within vacuum environments by eliminating mechanical contacts and reducing outgassing, while allowing for cost-effective non-vacuum compatible robot designs that maintain a sealed environment during movement.
Implementation Method 1
a magnetic system configured to vertically space the first device over the at least two rails with a gap between the first device and the at least two rails
Implementation Method 2
the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device
Implementation Method 3
a linear actuator configured to move the first device in the path along the at least two rails
Data Source
AI summary
An apparatus including a first device configured to support a substrate thereon; a first transport having the first device connected thereto, where the first transport includes: rails or maglev guides; a magnetic system configured to vertically space the first device over the rails or maglev guides with a gap between the first device and the rails or maglev guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and a linear actuator configured to move the first device along the rails or maglev guides.