Maglev Substrate Transfer Module With Wireless Coil Power
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Solution Overview
Problem
Existing substrate transfer systems using magnetic levitation lack a reliable and efficient method for wirelessly supplying power to power-consuming devices on the substrate transfer module, which can be cumbersome with wired connections or inefficient with alternative power transmission methods.
Innovation Solution
A substrate transfer device employs a system of first coils generating a magnetic field on a moving surface, combined with magnets on the transfer module to create repulsive forces for levitation, and includes a second coil for wireless power supply to sensors and other devices using an electromotive force induced by the magnetic field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wired connections are used to supply power to power-consuming devices on the substrate transfer module, then power supply reliability is improved, but the weight of the transfer module increases and operational flexibility deteriorates
Solution Approach 1:
The patent replaces the mechanical wired power supply system with an electromagnetic wireless power supply system. The second coil generates a magnetic field that induces current in the power receiving component, eliminating the need for physical wire connections and thereby reducing the weight of the substrate transfer module while maintaining power supply reliability.
Solution Approach 2:
The patent introduces a magnetic field as an intermediary to transfer power from the substrate transfer device to the substrate transfer module. The second coil generates the magnetic field, and the power receiving component on the module converts this field into electrical current, serving as a non-contact power transmission medium that avoids the weight penalty of wired connections.
2Adaptability or versatility
If batteries are used to store power on the substrate transfer module, then operational independence is improved, but the weight increases and power supply duration is limited
Solution Approach 1:
The patent establishes continuous power supply through real-time wireless energy transmission from the substrate transfer device to the substrate transfer module during operation. The magnetic field is continuously generated by the second coil, and the power receiving component continuously converts it to electrical current, eliminating the need for heavy batteries and their associated weight while maintaining operational independence.
3Weight of moving object
If wireless power supply is implemented using electromagnetic induction, then weight is reduced and operational flexibility is improved, but power supply efficiency may deteriorate
Solution Approach 1:
The patent concentrates the magnetic field generation in a localized area directly beneath the substrate transfer module using the second coil. This focused electromagnetic induction approach minimizes energy dispersion and maximizes coupling efficiency between the transmitting coil and the receiving component, thereby maintaining high power supply efficiency while achieving weight reduction through wireless transmission.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and uninterrupted power supply to sensors and other devices on the transfer module during movement, maintaining system performance and throughput without the weight or limitations of wired connections or other power transmission methods.
Implementation Method 1
a tile part forming a moving surface of an area where a substrate is transferred and provided with a plurality of first coils that generate magnetic field on the moving surface by a power supplied from a power supply part
Implementation Method 2
a substrate transfer module including a plurality of magnets that exert a repulsive force against the magnetic field and a substrate holder configured to hold a substrate to be transferred, the substrate transfer module configured to move above the moving surface by magnetic levitation using the repulsive force
Implementation Method 3
the substrate transfer module includes a second coil for wirelessly supplying a power to a power consuming device provided in the substrate transfer module during movement above the moving surface using an electromotive force that is exerted against the magnetic field generated by the first coils
Data Source
AI summary
Provided is a substrate transfer device comprising: a tile part forming a moving surface of an area where a substrate is transferred and provided with a plurality of first coils that generate magnetic field on the moving surface by a power supplied from a power supply part; and a substrate transfer module including a plurality of magnets that exert a repulsive force against the magnetic field and a substrate holder configured to hold a substrate to be transferred, the substrate transfer module configured to move above the moving surface by magnetic levitation using the repulsive force, wherein the substrate transfer module includes a second coil for wirelessly supplying a power to a power consuming device provided in the substrate transfer module during movement above the moving surface using an electromotive force that is exerted against the magnetic field generated by the first coils.