Magnesium Fluoride Passivation for Low-Contamination Chamber Components
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Solution Overview
Problem
Existing methods for forming protective coatings on process chamber components in semiconductor manufacturing are inadequate, as they often result in debris or particulates that contaminate the workpiece, and plasma-based methods can be inefficient for forming uniform coatings on complex features.
Innovation Solution
A method involving a chemical reaction between a fluorine source and magnesium present in the metal body forms a magnesium fluoride surface passivation region, which is conformal and resistant to chemical degradation, using molecular fluorine vapor at elevated temperatures without plasma.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional coating methods (anodizing, spray coating, PVD) are used to form protective layers on process chamber components, then the substrate gains protective properties, but debris or particulates are generated that contaminate the workpiece
Solution Approach 1:
The metal substrate contains magnesium that reacts with fluorine vapor to form magnesium fluoride passivation region in-situ, eliminating the need for separate coating applications that generate debris. The substrate essentially forms its own protective layer through chemical reaction with the vapor phase fluorine source.
Solution Approach 2:
The patent replaces mechanical coating methods (spray coating, PVD, anodizing) with a chemical vapor phase process. The fluorine source is introduced as vapor that chemically reacts with magnesium in the substrate to form the protective magnesium fluoride layer, avoiding mechanical contact and particulate generation.
2Manufacturing precision
If plasma-based methods are used to form protective coatings, then coating formation is achieved, but uniform coating on complex high aspect ratio features is difficult
Solution Approach 1:
The patent uses vapor phase fluorine source that flows through and penetrates complex high aspect ratio features uniformly. The vapor phase delivery system enables the fluorine to reach all surfaces including deep recesses, forming uniform magnesium fluoride passivation regions throughout complex geometries.
3Reliability
If separate protective coating materials are deposited onto the surface, then protection is provided, but the process is complex and time-consuming
Solution Approach 1:
The patent combines the substrate material (magnesium-containing metal) with the protective layer material (magnesium fluoride) by having the magnesium originate from the substrate itself and react with fluorine vapor. This merging of substrate and coating source eliminates separate coating material preparation and application steps.
Solution Approach 2:
The substrate provides its own magnesium content that reacts with fluorine vapor to form the protective magnesium fluoride layer in-situ, eliminating the need for external coating material deposition processes and significantly reducing processing time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnesium fluoride passivation region provides enhanced chemical inertness and resistance to degradation, offering improved protection for process chamber components, especially in high aspect ratio features, with reduced contamination risks and extended durability.
Implementation Method 1
forming the magnesium fluoride region within the metal body by a chemical reaction between a fluorine source and magnesium that is present in the magnesium-containing metal of the metal body
Implementation Method 2
forming magnesium fluoride by exposing a metal body surface to a molecular fluorine vapor source at elevated temperature
Data Source
AI summary
Described are metal bodies made of magnesium-containing metal and having a magnesium fluoride surface passivation region formed at a surface of the body, as well as methods of forming a magnesium fluoride surface passivation region at a surface of a metal body, and uses for the bodies.