Magnesium Fluoride Passivation on Metal Bodies for Reactive Chambers
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Solution Overview
Problem
Semiconductor and microelectronic device manufacturing processes require process chamber components that are resistant to reactive materials without degradation or contamination, but existing coatings are difficult to form and may not provide sufficient protection.
Innovation Solution
Form a magnesium fluoride surface passivation region on metal bodies by reacting endogenous magnesium in the metal with molecular fluorine vapor at elevated temperatures, creating a chemically inert and resistant layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional coating methods (anodizing, spray coating, PVD) are used to form protective layers on metal substrates, then the substrate gains some resistance to reactive process materials, but the coating may degrade or produce debris that contaminates the workpiece
Solution Approach 1:
The metal substrate serves its own protective function by forming magnesium fluoride in situ from endogenous magnesium content. The substrate material itself (through its magnesium component) transforms into the protective layer, eliminating the need for separate coating materials that could degrade and contaminate the workpiece.
Solution Approach 2:
The invention creates a composite structure where magnesium fluoride forms a protective layer on the metal substrate. This composite of metal substrate plus magnesium fluoride coating provides enhanced chemical resistance while the coating is derived from the substrate's own composition, ensuring compatibility and reduced degradation issues.
2Reliability
If separate protective coatings are deposited onto metal substrates, then the substrate gains protection, but the process complexity increases and the coating may not provide sufficient protection against highly reactive materials
Solution Approach 1:
The substrate contains endogenous magnesium that automatically forms the protective magnesium fluoride layer when exposed to fluorine-containing process materials. This self-forming mechanism eliminates complex external coating deposition equipment and processes, simplifying the overall system while providing reliable protection.
Solution Approach 2:
The metal substrate is pre-alloyed with magnesium before use, preparing it in advance to form the protective fluoride layer. This preliminary incorporation of magnesium into the substrate ensures that the protective layer forms automatically during normal operation without requiring additional coating steps.
3Stability of the object's composition
If conventional coatings are applied to metal surfaces, then some protection is achieved, but the coating formation is difficult and may not ensure sufficient chemical inertness
Solution Approach 1:
The substrate's endogenous magnesium content automatically reacts with fluorine to form magnesium fluoride, creating a chemically inert surface without requiring complex external coating processes. The substrate serves its own protective function through this self-forming mechanism.
Solution Approach 2:
The invention changes the chemical composition parameter of the metal substrate by incorporating magnesium, which enables the formation of chemically inert magnesium fluoride. This compositional modification transforms the substrate's surface chemistry to provide the desired chemical inertness automatically.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnesium fluoride passivation region provides enhanced chemical inertness and resistance to degradation, offering improved protection against reactive process materials and extended lifetime in semiconductor processing tools.
Implementation Method 1
forming the magnesium fluoride region within the metal body by a chemical reaction between a fluorine source and magnesium that is present in the magnesium-containing metal of the metal body
Implementation Method 2
forming magnesium fluoride by exposing a metal body surface to a molecular fluorine vapor source at elevated temperature
Data Source
AI summary
Described are metal bodies made of magnesium-containing metal and having a magnesium fluoride surface passivation region formed at a surface of the body, as well as methods of forming a magnesium fluoride surface passivation region at a surface of a metal body, and uses for the bodies.