Magnet Module with Varying Widths for Sputtering Uniformity
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Solution Overview
Problem
The existing magnet modules in sputtering apparatuses do not provide a uniform magnetic field distribution, leading to non-uniform target erosion and deposition, which affects the quality of the thin film formed.
Innovation Solution
A magnet module design featuring a first magnet member with varying widths and a second magnet member with specific spatial relationships, including corner portions and shielding members, to enhance magnetic field uniformity and target erosion uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a magnetic field is formed by a magnet module to increase deposition rate, then deposition speed increases, but magnetic field distribution becomes non-uniform causing irregular target erosion
Solution Approach 1:
The magnet module employs magnet members with different widths at different positions to create locally optimized magnetic field characteristics. Specifically, the first magnet member has a first width in a first region and a second width in a second region, allowing the magnetic field strength to be adjusted locally to achieve more uniform plasma distribution and target erosion across the target surface.
Solution Approach 2:
The magnet module uses asymmetric magnet member configurations where the first magnet member and second magnet member have different geometries and positioning. The first magnet member extends in a first direction with varying width, while the second magnet member extends in a second direction with specific spacing, creating an asymmetric arrangement that compensates for natural magnetic field non-uniformity and improves overall field distribution.
2Manufacturing precision
If magnet members are arranged to improve magnetic field uniformity, then target erosion uniformity improves, but device complexity increases
Solution Approach 1:
The magnet module is divided into multiple discrete magnet members including a first magnet member and a second magnet member, each with specific geometric characteristics and positioning. This segmentation allows independent optimization of each magnet member's dimensions and placement to achieve uniform magnetic field distribution while maintaining modular construction that simplifies manufacturing and assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved magnetic field uniformity results in more uniform target erosion and enhanced quality of the thin film deposited, allowing the target to be used for a longer time.
Implementation Method 1
a magnetic field formed by a magnet module disposed adjacent to a target may trap ions to generate a highly-dense plasma
Implementation Method 2
Sputtering is a deposition method that provides a target atom exiting from a target when ions in a plasma collide with the target by an electric energy applied to the ions
Data Source
AI summary
A magnet module includes at least one magnet unit. The magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion, which is disposed in the middle portion and extends along the first direction, and a second portion, which is disposed in the end portion and has a width greater than a width of the first portion.