Magnet Plate Assembly for OLED Mask Shadow Effect Reduction

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Solution Overview

Problem

In the manufacturing of high-resolution organic light-emitting display devices, the vacuum deposition method faces challenges due to the narrow slits in masks, leading to a shadow effect caused by the gap between the substrate and the mask, which affects the uniform deposition of materials.

Innovation Solution

A magnet plate assembly is introduced, comprising magnetic substances supported by a magnet supporter and a guide unit with a coupler and driver unit, allowing for precise movement and adjustment of the magnetic forces to attract the mask closely to the substrate, minimizing the gap and shadow effect during deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the mask slits are narrowed to achieve high resolution deposition, then the deposition precision is improved, but the shadow effect increases due to the gap between substrate and mask

Engineering Contradiction:
Improvedeposition precisionVSAvoidshadow effect
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies magnetic substances that can be dynamically moved and positioned to different locations on the substrate. This dynamic positioning allows the magnetic field to adaptively compensate for the shadow effect while maintaining narrow slit deposition, resolving the contradiction between deposition precision and shadow effect reduction

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the spatial distribution parameters of magnetic substances during the deposition process. By adjusting the position and configuration of magnetic substances, the magnetic field distribution is optimized to minimize shadow effects while preserving high-resolution deposition capabilities

Inventive Principle:
Principle #35Parameter changes

2Object-affected harmful factors

If magnetic substances are added to attract the mask to the substrate, then the shadow effect is reduced, but the device complexity increases

Engineering Contradiction:
Improveshadow effectVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The magnetic substances serve multiple functions: they generate magnetic fields to reduce shadow effects, can be positioned to control deposition patterns, and may assist in mask positioning. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The magnetic substances act as an intermediary between the deposition system and the substrate, mediating the interaction by creating a magnetic field that pulls the mask toward the substrate. This intermediary approach provides a simple yet effective solution without requiring complex mechanical adjustment mechanisms

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The magnet plate assembly ensures a uniform magnetic force is applied to the mask, reducing the shadow effect and enabling precise deposition of materials onto the substrate, enhancing the resolution and quality of organic light-emitting display devices.

Implementation Method 1

a plurality of magnetic substances having predetermined magnetic forces... configured to apply a predetermined magnetic force to the mask to attract the mask toward the substrate

Methodology Applied
Scientific EffectMagnetic force: Magnetism

Data Source

PatentUS9583245B2Magnet plate assembly, deposition apparatus including the magnet plate assembly, and deposition method using the magnet plate assembly
Publication Date: 2017.02.28 SAMSUNG DISPLAY CO LTD
  • US9583245B2 patent drawing
  • US9583245B2 patent drawing
  • US9583245B2 patent drawing

AI summary

A magnet plate assembly includes a plurality of magnetic substances having predetermined magnetic forces, a magnet supporter supporting at least a corresponding one of the plurality of magnetic substances, and a guide support supporting the magnet supporter and comprising at least one guide opening. The magnetic plate assembly further includes a coupler extending through the at least one guide opening and movable within the at least one guide opening, the coupler being connected to the magnet supporter; and a driver unit connected to the coupler and configured to move the corresponding one of the plurality of magnetic substances with respect to the guide support.