Magnetic Actuator Current Compensation for Temperature Effects
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Solution Overview
Problem
Precision motion applications, such as photolithography, face accuracy issues due to disturbances like vibrations and temperature changes affecting the force constant of magnetic actuators, which can compromise the integrity of processed wafers.
Innovation Solution
Implementing a system with a temperature sensing arrangement and control mechanism to adjust the current provided to magnetic actuators based on real-time temperature measurements, maintaining a constant force output by compensating for temperature-induced changes in the force constant.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If active vibration isolation systems are incorporated to dampen vibrations, then vibration effects are reduced, but temperature effects on actuator force constant become more prevalent
Solution Approach 1:
The system incorporates temperature sensors that continuously monitor the temperature of the magnet and stage, feeding this information back to a controller. The controller dynamically adjusts the actuator current based on the measured temperature to compensate for force constant changes, thereby maintaining positioning accuracy despite temperature variations.
Solution Approach 2:
The system changes the electrical parameter (current) supplied to the actuator based on temperature conditions. By adjusting the current magnitude in response to temperature measurements, the system compensates for the temperature-dependent changes in the actuator's force constant, maintaining consistent performance across varying temperatures.
2Reliability
If the current to the actuator is increased to compensate for temperature effects, then the force constant is maintained, but energy consumption increases
Solution Approach 1:
The system dynamically adjusts the current supplied to the actuator based on real-time temperature measurements rather than using a fixed compensation value. The controller modifies the current magnitude as needed to maintain the desired force constant, optimizing energy usage by applying only the necessary compensation current rather than a constant elevated current.
Solution Approach 2:
The system changes the electrical parameter (current) supplied to the actuator based on temperature conditions. By adjusting the current magnitude in response to temperature measurements, the system compensates for the actuator's force constant changes while optimizing energy consumption through precise, condition-based adjustment rather than constant over-compensation.
3Manufacturing precision
If temperature compensation systems are added to maintain force constant, then accuracy is improved, but device complexity increases
Solution Approach 1:
The control system serves multiple functions: it controls the actuator current for positioning, monitors temperature through sensors, and automatically compensates for temperature effects on the force constant. By integrating these functions into a single control arrangement, the system achieves temperature compensation without proportionally increasing overall system complexity.
Solution Approach 2:
The system uses its own temperature sensors and control arrangement to automatically detect and compensate for temperature effects on the actuator. The compensation process is self-regulating, using the measured temperature data to automatically adjust the current without requiring external intervention or complex additional hardware.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the performance of magnetic actuators by maintaining a consistent force output despite temperature fluctuations, thereby improving the accuracy and integrity of precision motion applications.
Implementation Method 1
a temperature sensing arrangement and a control arrangement. The temperature sensing arrangement being arranged to determine or measure a temperature of the magnet
Implementation Method 2
The control arrangement adjusts the current provided to the actuator based on the temperature of the magnet. The current is adjusted to counteract the change in the force constant
Data Source
AI summary
Methods and apparatus for adjusting the amount of current provided to a magnetic actuator to compensate for a temperature change associated with the magnetic actuator are disclosed. According to one aspect of the present invention, an apparatus includes an actuator, which has at least one magnet and an associated force constant. The apparatus also includes a temperature sensing arrangement and a control arrangement, the temperature sensing arrangement being arranged to determine or measure a temperature of the magnet. The control arrangement adjusts the current provided to the actuator based on the temperature of the magnet. The current is adjusted to maintain a correct or desired force in light of temperature-induced variations to a force constant.