Magnetic Actuator Shielding for Vibration Isolation Near Electron Microscopes

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Solution Overview

Problem

Magnetic actuators in vibration isolation systems generate magnetic fields that interfere with magnetically sensitive devices like electron microscopes, preventing their operation in the vicinity of production facilities or other sources of ground vibrations.

Innovation Solution

A vibration isolation system with magnetic actuators equipped with a magnetic shield, particularly using mu-metal or soft iron with high permeability, to minimize magnetic interference, allowing the system to be used near sensitive devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If a large-capacity actuator is used to drive the vibration isolation unit, then the driving force is sufficient, but the device size and weight increase

Engineering Contradiction:
Improvedriving forceVSAvoidactuator weight
Core Design Contradiction:
ForceVSWeight of moving object

Solution Approach 1:

The patent replaces the traditional mechanical actuator with a magnetic actuator that uses electromagnetic fields to generate driving force. The magnetic actuator includes a magnet and a magnetic force generation unit that interacts with the magnet to produce linear driving force, eliminating the need for heavy mechanical components while maintaining sufficient driving capability for vibration isolation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Force

If a large-capacity actuator is used to drive the vibration isolation unit, then the driving force is sufficient, but the device size increases

Engineering Contradiction:
Improvedriving forceVSAvoidactuator volume
Core Design Contradiction:
ForceVSVolume of moving object

Solution Approach 1:

The magnetic actuator replaces bulky mechanical actuator components with compact electromagnetic elements. The magnet and magnetic force generation unit can be arranged in a space-efficient configuration, significantly reducing the overall volume while providing adequate driving force for the vibration isolation unit.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Force

If mechanical actuators are used for vibration isolation, then the driving force is sufficient, but the number of moving parts increases device complexity

Engineering Contradiction:
Improvedriving forceVSAvoidnumber of moving parts
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

The magnetic actuator eliminates complex mechanical transmission components such as gears, belts, and linkages. The electromagnetic field directly generates linear driving force on the vibration isolation unit, resulting in fewer moving parts and simplified device architecture while maintaining adequate driving capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables operation of high-precision instruments like electron microscopes close to production facilities by reducing magnetic fields to below 15 nT, ensuring accurate measurements without interference.

Implementation Method 1

a magnetic force generation unit that generates a linear driving force for the vibration isolation unit by interacting with the magnet

Methodology Applied
Scientific EffectMagnetic force generation: Lorentz Force

Implementation Method 2

a vibration isolation unit that isolates the projector from a support surface on which the projector is to be placed, thereby reducing vibrations of the projector

Methodology Applied
Scientific EffectVibration isolation: Damping

Data Source

PatentEP3942197B1Vibration insulation system with a magnetic actuator
Publication Date: 2026.05.06 INTEGRATED DYNAMICS ENG
  • EP3942197B1 patent drawingFigure 1
  • EP3942197B1 patent drawingFigure 2
  • EP3942197B1 patent drawingFigure 3

AI summary

The invention relates to an active vibration isolation system having a magnetic actuator. The magnetic actuator comprises a coil carrier having at least one coil, which coil carrier extends contactlessly into a magnet carrier, so that the latter is designed as a linear motor. The magnetic actuator is provided with a magnetic shielding which has an opening through which the coil carrier projects into the magnet carrier.