Magnetically Supported Cable Slab to Prevent Wear and Particles

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Solution Overview

Problem

The wear and particle generation from the mechanical contact between flexible supply structures and their supports in lithographic apparatuses lead to reduced lifespan and substrate defects.

Innovation Solution

A flexible supply structure using repulsive magnetic forces between permanent magnets and supports to maintain a floating state, reducing direct mechanical contact and wear.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the cable slab is mechanically supported by the support surface, then the cable slab is stably supported, but wear occurs on the support surface and supply hoses/cables leading to reduced lifespan and particle generation

Engineering Contradiction:

Improvelifespan of supply hoses and cablesVSAvoidwear and particle generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the mechanical contact support system with a magnetic field-based support system. Permanent magnets mounted on the support generate magnetic fields that levitate the cable slab, eliminating direct mechanical contact between the cable slab and support surface. This substitution of mechanical support with magnetic field support resolves the wear and particle generation problem while maintaining stable support of the cable slab.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses magnetic repulsion forces from permanent magnets to counteract the gravitational weight of the cable slab. The magnetic field generates an upward lifting force that balances the downward gravitational force, creating a levitation effect that prevents mechanical contact and subsequent wear without requiring mechanical counterweights or additional support structures.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

2Duration of action of moving object

If the cable slab is mechanically supported during movement, then the supply structure remains stable, but friction and wear reduce the maximum life time of supply components

Engineering Contradiction:

Improvemaximum life time of supply hoses and cablesVSAvoidfriction force during movement

Core Design Contradiction:

Duration of action of moving objectVSForce

Solution Approach 1:

The patent replaces mechanical friction-based support with magnetic field-based support. The permanent magnets create a contactless magnetic bearing system that supports the cable slab during movement, eliminating kinetic friction between the cable slab and support surface. This extends the duration of action (lifespan) of the supply components by removing the degrading friction force.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If the cable slab is supported on a moving object with accelerations in perpendicular direction, then the supply structure adapts to multi-axis movement, but inertial forces cause sliding and wear

Engineering Contradiction:

Improvemulti-axis movement capabilityVSAvoidsliding wear from inertial forces

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces mechanical friction-based adaptation to multi-axis movement with magnetic field-based support. The permanent magnets mounted on the moving object create a magnetic field that levitates the cable slab, allowing it to follow multi-axis movements without mechanical contact. This eliminates sliding wear caused by inertial forces while maintaining adaptability to complex movement patterns.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent creates a dynamic magnetic support system where the permanent magnets on the moving object continuously adjust the magnetic field position to follow the cable slab during multi-axis movements. This dynamic magnetic bearing system adapts to changing positions and accelerations without mechanical contact, preventing wear while maintaining versatility.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents wear and particle generation, enhancing the lifespan of supply hoses and cables while minimizing substrate defects in lithographic processes.

Implementation Method 1

the cable slab is arranged to be at least partially supported by a support comprising a second magnet having a second magnetic field orientation such that the first permanent magnet and the second magnet are repulsing when the first permanent magnet and the second magnet are facing each other to exert a force, for example a lifting force, on the cable slab

Methodology Applied

Scientific EffectMagnetic repulsion: Magnetism

Data Source

PatentUS20250298328A1Cable slab, positioning module and lithographic apparatus

Publication Date: 2025.09.25 ASML NETHERLANDS BV

AI summary

There is provided a cable slab for connecting a first movable object with a second object, the cable slab comprises a first permanent magnet having a first magnetic field orientation, the cable slab is arranged to be at least partially supported by a support comprising a second magnet having a second magnetic field orientation such that the first permanent magnet and the second magnet are repulsing when the first permanent magnet and the second magnet are facing each other to exert a force on cable slab, and the cable slab comprises one or more clamp brackets, each clamping one or more supply hoses and/or supply cables, the first permanent magnet is arranged in or on one of the one or more clamp brackets.