Magnetic Chucking Pin Dynamics for Substrate Contamination
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Solution Overview
Problem
Chemicals often remain at the contact surface between the support member and the substrate during substrate processing, leading to contamination and process defects, as existing methods fail to effectively manage the contact between the substrate and the chucking pins during spinning operations.
Innovation Solution
A spin head with rotatable support plates and chucking pins that utilize a magnetic driving unit to selectively move the pins in and out of contact with the substrate edge, ensuring that only specific pins are in contact during processing to prevent chemical residue accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the support member continuously contacts the substrate edge during spinning, then the substrate is securely held, but chemicals accumulate at the contact surface causing contamination
Solution Approach 1:
The chucking pins are designed to be movable rather than fixed, allowing them to dynamically adjust their contact state with the substrate. The magnetic driving unit enables the pins to move between contact and non-contact positions, transforming the static support structure into a dynamic one that can prevent chemical accumulation while maintaining substrate holding stability during spinning operations
Solution Approach 2:
The patent replaces the traditional continuously-contacting mechanical support structure with a magnetic field-based control system. The magnetic driving unit uses magnetic attraction and repulsion forces to control the contact state of chucking pins, substituting constant mechanical contact with controllable magnetic interaction, thereby preventing chemical residue buildup at fixed contact points
2Reliability
If multiple chucking pins contact the substrate simultaneously, then the substrate is securely clamped, but more contact surfaces accumulate chemicals
Solution Approach 1:
The magnetic driving unit controls chucking pins to operate in periodic cycles of contact and non-contact states. During substrate processing, pins are alternately positioned to contact the substrate for secure clamping and then retracted to prevent chemical accumulation, creating a periodic action pattern that balances clamping security with contamination prevention
Solution Approach 2:
The substrate support function is segmented across multiple independently controllable chucking pins. Instead of having all pins contact the substrate simultaneously, the magnetic driving unit enables selective and sequential engagement of individual pins, dividing the continuous support function into discrete, controllable segments that reduce overall contact surface area and chemical accumulation points
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for effective removal of chemicals from the substrate contact surface, uniform treatment, and prevention of pin separation during rotation, thereby reducing process defects and ensuring clean substrate processing.
Implementation Method 1
a driving unit for selectively moving the first and second chucking pins in the radius outside direction of the support plate by means of a magnetic force
Data Source
AI summary
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.