Magnetic Core Nanoparticles for Controllable Pore Processing
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Solution Overview
Problem
Current methods for processing nanopores are limited in controlling pore sizes above 100 nm due to the random motion of gold nanoparticles during processing and the requirement for gold nanoparticles to be smaller than the wavelength of light for efficient energy absorption, making it challenging to achieve shape-controllable pores.
Innovation Solution
A method involving the use of micro-nano metal particles centered on a magnetic core, with a metal nano-particle coating of gold, silver, or aluminum, exposed to laser irradiation and a strong uniform magnetic field to directionally move and process nanopores of any shape and size above 100 nm, allowing for precise control of pore size, shape, and depth without the need for contaminating reagents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If gold nanoparticles with diameter 10-100 nm are used to absorb light energy efficiently, then high-temperature hot spot is generated for material elimination, but the pore size is strictly limited to 10-100 nm
Solution Approach 1:
The invention segments the nanoparticle system into two functional parts: a magnetic core (for control) and a metal shell (for light absorption). This segmentation allows the metal shell to generate hot spots at 10-100 nm scale while the magnetic core enables directional control, ultimately forming pores larger than 100 nm by controlling the movement and aggregation of these composite particles.
Solution Approach 2:
The invention uses composite micro-nano metal particles consisting of a magnetic core coated with metal nanoparticles (gold, silver, or aluminum). This composite structure combines the light-absorbing properties of metal nanoparticles with the magnetic responsiveness of the core, enabling both efficient energy absorption and directional control during processing.
2Temperature
If gold nanoparticles are used for processing, then local plasmon resonance generates hot spot for material elimination, but the motion trajectory is random due to substrate evaporation affecting the particles
Solution Approach 1:
The magnetic core acts as an intermediary that mediates between the external magnetic field and the metal nanoparticle shell. It transmits magnetic field influence to the entire composite particle, enabling directional control of the motion trajectory while maintaining the hot spot generation capability of the metal shell.
Solution Approach 2:
The invention changes the physical parameter of the nanoparticle by introducing a magnetic core, which fundamentally alters the particle's response to external fields. This parameter change enables the particle to respond to magnetic fields for directional control, solving the randomness issue while preserving the thermal processing capability.
3Use of energy by moving object
If gold nanoparticles smaller than wavelength of light are used, then efficient light energy absorption is achieved, but it is challenging to process nanopores above 100 nm with shape control
Solution Approach 1:
The invention introduces dynamic control capability to the nanoparticle system through the magnetic core. The particles can dynamically change their position and trajectory in response to magnetic field adjustments, enabling precise shaping of pores larger than 100 nm while maintaining efficient light energy absorption during the processing dynamic.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the controllable processing of blind holes or through holes with pore sizes above 100 nm, overcoming the limitations of existing technologies by using a magnetic field to guide micro-nano metal particles and absorb laser energy effectively, promoting the method's applicability in biodetection and electronic manufacturing.
Implementation Method 1
exposed to laser irradiation to generate surface plasmon resonance on the surface of the metal nano-particle coating
Implementation Method 2
a strong uniform magnetic field is applied to drive the micro-nano metal particles to directionally move on the substrate
Implementation Method 3
the energy of laser is absorbed and converted into a small hotspot. The plurality of gold, silver or aluminum nanoparticles are accumulated on the surface of the micro-nano metal particles since they are centered on the magnetic core, and therefore small hotspots formed by single gold nanoparticle are combined into a large hotspot allowing the substrate in contact with the micro-nano metal particles to be evaporated
Data Source
AI summary
A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.


