Magnetic Coupling Device with Optimized Repulsion Zone for Stable Rotation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Magnetic coupling devices in vacuum deposition apparatuses face issues with unstable rotation and poor followability of the driven magnet array at constant speeds due to poor torque transmission and movement stability.

Innovation Solution

A magnetic coupling device design featuring a driving magnet array with annular sector-shaped first permanent magnets and a driven magnet array with annular or circular sector-shaped second permanent magnets, where the repulsion zone area is 5% to 15% of the attraction zone area, ensuring stable and constant rotation by optimizing the positional relationship and arrangement of magnets.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional magnetic coupling devices use standard magnet arrangements, then the structure is simple, but the driven magnet array cannot rotate at constant speed and exhibits unstable movement

Engineering Contradiction:
Improverotation stabilityVSAvoidmagnet arrangement complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by creating non-uniform magnetic field distributions through specifically designed attraction zones and repulsion zones. The repulsion zone area is set to 5-15% of the attraction zone area, creating localized magnetic characteristics that differ from standard uniform arrangements. This local differentiation in magnetic field properties enables constant speed rotation while maintaining overall structural simplicity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes key parameters of the magnetic coupling system, specifically the area ratio between repulsion and attraction zones (setting it to 5-15%). This parameter modification transforms the magnetic interaction characteristics, enabling the driven magnet array to achieve stable constant speed rotation. The parameter change is applied to the magnetic field distribution rather than the overall device structure, resolving the contradiction between reliability improvement and device complexity.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the driven magnet array uses standard magnetic coupling, then the device structure remains simple, but the followability and torque transmission are poor

Engineering Contradiction:
ImprovefollowabilityVSAvoidmagnet configuration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent creates localized magnetic field characteristics by defining specific attraction zones and repulsion zones with different area proportions. The repulsion zone occupies 5-15% of the attraction zone area, creating local magnetic field variations that enhance torque transmission and followability. This local differentiation improves performance without requiring complex overall magnet configuration.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs periodic magnetic interactions through the alternating attraction and repulsion zones as the magnet arrays rotate. The periodic variation in magnetic force, created by the zoned arrangement, provides continuous torque transmission and improves followability. This periodic action mechanism enhances reliability while maintaining relatively simple magnet configuration.

Inventive Principle:
Principle #19Periodic action

3Reliability

If conventional magnetic coupling is used, then the device is easy to manufacture, but unstable torque transmission occurs during rotation

Engineering Contradiction:
Improvetorque transmission stabilityVSAvoidmagnet arrangement precision
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent applies local quality by creating distinct attraction zones and repulsion zones with specific area ratios (5-15%). This local differentiation in magnetic field properties ensures stable torque transmission through controlled magnetic interactions. The approach maintains ease of manufacture by applying the principle to zone area ratios rather than requiring complex magnet geometries or high-precision arrangements.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the magnetic field distribution parameters by setting the repulsion zone area to 5-15% of the attraction zone area. This parameter modification stabilizes torque transmission during rotation. The parameter change is implemented through zone area ratios, which can be controlled during manufacturing without requiring excessive precision, thus maintaining ease of manufacture while improving reliability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves stable and constant rotation of the driven magnet array at low speeds, improving followability and torque transmission, thereby ensuring uniform film deposition in vacuum deposition processes.

Implementation Method 1

a magnetic coupling device having a driving magnet array of a plurality of first permanent magnets arranged circumferentially and having alternating polarities, and a driven magnet array of a plurality of second permanent magnets arranged circumferentially and having alternating polarities

Methodology Applied
Scientific EffectMagnetic attraction and repulsion: Magnetism

Data Source

PatentUS11670999B2Magnetic coupling device
Publication Date: 2023.06.06 TOKYO ELECTRON LTD
  • US11670999B2 patent drawing
  • US11670999B2 patent drawing
  • US11670999B2 patent drawing

AI summary

A magnetic coupling device includes a driving magnet array having multiple annular sector-shaped, circumferentially arranged first permanent magnets, and a driven magnet array having multiple circular sector-shaped, circumferentially arranged second permanent magnets with pole surfaces facing pole surfaces of the first permanent magnets. The driven magnet array is rotated by the driving magnet array being rotated. A repulsion zone where a repulsive force acts is designed to have an area that is 5% to 15% of that of an attraction zone where an attractive force acts between a specific first permanent magnet and a specific second permanent magnet, with a radial first centerline of the specific first permanent magnet overlapping a radial second centerline of the specific second permanent magnet so that opposite poles face each other, including between first and second permanent magnets respectively adjacent the specific first and second permanent magnets with overlapping the centerlines.