Magnetic Coupling Substrate Support for Damage Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate supporting apparatuses risk damaging substrates with softer materials when attaching them to holders due to excessive pressure from transport robots, and the buffer mechanisms need higher elasticity to accommodate diverse substrate sizes and masses.
Innovation Solution
A substrate supporting apparatus featuring a first connecting member with a magnet and a second connecting member with a magnetically coupled spacer, allowing relative movement in the plane direction to reduce external force and prevent damage, with the spacer providing a buffer function in both plane and circumferential directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a buffer mechanism is introduced to prevent substrate damage during attachment, then the substrate is protected from damage, but the device complexity increases
Solution Approach 1:
The patent replaces complex mechanical buffer mechanisms with a magnetic coupling system. The first and second connecting members are magnetically coupled through spacers, allowing relative movement in the plane direction without requiring complex mechanical cushioning structures. This magnetic coupling provides the necessary buffer effect while significantly simplifying the overall device structure.
Solution Approach 2:
The spacer acts as an intermediary element between the first and second magnets, enabling relative movement while maintaining magnetic coupling. This intermediary structure allows the connecting members to move relative to each other in the plane direction, providing buffer effect during substrate attachment without requiring complex mechanical systems.
2Object-affected harmful factors
If the buffer mechanism is made more elastic to accommodate softer substrates, then the substrate is better protected, but the device complexity and difficulty of control increase
Solution Approach 1:
The patent changes the physical parameters of the buffer mechanism by using magnetic coupling instead of mechanical elasticity. The magnetic force provides a controllable and adjustable buffer effect that can be optimized for different substrate materials and sizes without increasing mechanical complexity. The magnetic coupling strength and spacer dimensions can be adjusted to match different substrate requirements.
3Manufacturing precision
If the connecting members are fixed to maintain precise positioning, then the positioning accuracy is improved, but the ability to absorb impact and prevent substrate damage is reduced
Solution Approach 1:
The patent introduces dynamic movement capability to the connecting members while maintaining positioning accuracy. The first and second connecting members can move relative to each other in the plane direction through the magnetic coupling and spacer mechanism, allowing the system to adapt to different substrate positions and absorb impact without sacrificing positioning precision.
Solution Approach 2:
The patent segments the connection system into multiple independent components (first connecting member, second connecting member, spacers, and magnets). This segmentation allows each component to perform its specific function: the magnets provide magnetic coupling for positioning, while the spacers enable relative movement for impact absorption. The modular structure achieves both positioning accuracy and damage prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the risk of damage to substrates by distributing force evenly and ensuring proper attachment and detachment without breaking the substrate, while maintaining centering and neutral position during load removal.
Implementation Method 1
The second connecting member includes a second magnet magnetically coupled with the first magnet
Data Source
AI summary
A substrate supporting apparatus includes a substrate support that supports a substrate. A first connecting member is connected to the substrate support and includes a first magnet. A second connecting member faces the first connecting member and is connectable to a transport robot for transporting the substrate to a substrate holder. The second connecting member includes a second magnet magnetically coupled with the first magnet. A spacer is configured to hold an interval between the first connecting member and the second connecting member. The first connecting member and the second connecting member are relatively movable in a plane direction of the substrate via the spacer.