Magnetic Deposition Mask Alignment Precision
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Solution Overview
Problem
Conventional deposition mask production methods result in misalignment of opening patterns and alignment marks due to stretching and fixing of the mask sheet, leading to inaccurate alignment with the film formation substrate.
Innovation Solution
A production method involving a mask member with resin film and magnetic metal through-holes, where opening patterns and alignment marks are formed after bonding to a frame, using laser irradiation to create patterns with precise dimensions and coordinates, ensuring accurate positioning despite potential shifts during stretching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the mask sheet is stretched and fixed to the frame by spot welding, then the mask sheet can be securely mounted, but the opening patterns and alignment marks become misaligned due to extension of the mask sheet
Solution Approach 1:
The opening patterns and alignment marks are formed on the mask sheet before the stretching and mounting process. By preparing the patterns in advance on the un stretched mask sheet, the subsequent stretching does not affect the relative positions of the patterns, as they are already established. This preliminary action ensures that the patterns maintain their intended geometry despite the mechanical deformation during mounting.
Solution Approach 2:
The invention changes the material parameter of the mask sheet from conventional nickel or nickel alloy to a magnetic metal material. This material parameter change enables the use of magnetic bonding instead of mechanical spot welding, thereby avoiding the stretching and extension that causes misalignment while still achieving secure mounting to the frame.
2Ease of manufacture
If conventional nickel or nickel alloy mask sheets are used, then the mask can be manufactured with traditional methods, but the mask sheet extends during stretching causing misalignment
Solution Approach 1:
The invention changes the material parameter from conventional nickel/nickel alloy to magnetic metal material. This parameter change fundamentally alters the bonding mechanism from mechanical (spot welding with stretching) to magnetic (contactless or minimal-contact bonding), thereby eliminating the extension problem while maintaining ease of manufacture through a different but equally effective process.
3Device complexity
If the opening patterns are formed before fixing the mask sheet to the frame, then the manufacturing process is simplified, but the patterns become misaligned due to mask sheet extension
Solution Approach 1:
The opening patterns and alignment marks are formed as preliminary features on the mask sheet before the mounting process. This preliminary formation simplifies the overall process by eliminating the need for post-mounting alignment adjustments, while the magnetic bonding method ensures that no extension occurs to disrupt this preliminary work.
Solution Approach 2:
By changing the material parameter to magnetic metal, the bonding process parameter changes from high-stress mechanical welding to low-stress magnetic attraction. This parameter change allows the patterns to be formed early in the process without risk of subsequent misalignment during mounting, maintaining both process simplicity and high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances positional accuracy of opening patterns and alignment marks, ensuring precise alignment with the substrate, even when the mask member extends during bonding, thereby improving the overall thin-film pattern formation process.
Implementation Method 1
a mask member in which a resin film and a magnetic metal member, which has a plurality of first and second through-holes formed at positions respectively corresponding to a plurality of thin-film patterns
Implementation Method 2
a portion of the film at the position corresponding to the thin-film pattern in each of the first through-holes is irradiated with laser light to form an opening pattern having a shape and dimension that are the same as those of the thin-film pattern
Data Source
AI summary
To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first through-holes and second through-holes, are brought into close contact; a second step in which a peripheral edge of the magnetic metal member is bonded to one end face of a frame; and a third step in which a portion of the film in each first through-hole is irradiated with laser light to form an opening pattern, and a portion of the film in each second through-hole is irradiated with laser light to form a mask-side alignment mark.