Adjustable Magnetic Field Test Cap for Semiconductor Characterization

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Solution Overview

Problem

Semiconductor devices, particularly magnetic random access memory (MRAM) cells and magnetic field strength sensors, are sensitive to external magnetic fields, making it challenging to achieve consistent performance, necessitating effective magnetic property characterization to build immunity against magnetic field variations.

Innovation Solution

A test apparatus with a cap capable of generating adjustable magnetic fields using permanent magnets and adjustment members, such as gaskets or screws, to apply varying magnetic field strengths to semiconductor devices, allowing for flexible characterization testing across different semiconductor devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a fixed magnetic field strength is used during testing, then the testing process is simple, but the adaptability to different semiconductor devices is poor

Engineering Contradiction:
Improveadaptability to different semiconductor devicesVSAvoidcomplexity of test apparatus
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements adjustable magnetic field strength by allowing the cap structure to be modified with different magnetic field generating components (permanent magnets, electromagnets, or magnetostrictive materials) and adjustable positioning mechanisms. This enables the same basic apparatus to adapt to different semiconductor devices by changing the magnetic field generating component 126 or adjusting its position, rather than requiring separate fixed-field apparatus for each device type.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If adjustable magnetic field strength is implemented, then the adaptability to different semiconductor devices is improved, but the device complexity increases

Engineering Contradiction:
Improveprecision of magnetic property characterizationVSAvoidcomplexity of cap structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent enables precise control of magnetic field strength by allowing adjustment of the magnetic field generating component 126's position, orientation, or activation level. Different component types (permanent magnets with adjustable spacing, electromagnets with variable current, magnetostrictive materials with adjustable magnetization) provide continuous or discrete adjustment of magnetic field parameters, achieving precise characterization without requiring overly complex multi-component systems.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The cap structure with its magnetic field generating component 126 can be replicated or adjusted for different testing scenarios. The same basic cap design can be used across multiple devices by adjusting the magnetic field component rather than designing entirely new apparatus for each device type, reducing overall system complexity while maintaining measurement precision.

Inventive Principle:
Principle #26Copying

3Adaptability or versatility

If multiple magnetic field strengths are applied to different regions, then the characterization capability is enhanced, but the manufacturing complexity increases

Engineering Contradiction:
Improvecharacterization capabilityVSAvoidease of assembling cap
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The cap is designed as a segmented structure with a cap body 122 and a separate magnetic field generating component 126 that can be independently positioned and adjusted. This segmentation allows different regions of the cap to have different magnetic field characteristics by placing multiple magnetic field generating components at different positions or orientations, while maintaining ease of assembly through modular construction rather than requiring monolithic complex structures.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise magnetic property characterization and improved consistency of semiconductor devices by allowing for the observation of magnetic field influences, enhancing the flexibility and accuracy of characterization tests.

Implementation Method 1

The magnet is configured to provide a magnetic field to the semiconductor device

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS11249131B2Test apparatus and testing method using the same
Publication Date: 2022.02.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11249131B2 patent drawing
  • US11249131B2 patent drawing
  • US11249131B2 patent drawing

AI summary

A test apparatus includes a tray including at least a first region and a second region, and a cap disposed over the tray. The cap includes a cap body, and at least a first magnet and a second magnet disposed over the cap body. The first magnet is configured to provide a first magnetic field to the first region of the tray, and the second magnet is configured to provide a second magnetic field to the second region of the tray. A strength of the first magnetic field is different from a strength of the second magnetic field.