Magnetic Gripping Apparatus for Cleanroom Pellicle Handling
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Solution Overview
Problem
Existing gripping apparatuses for pellicle assembly tools in lithographic systems often generate particles due to surface rubbing, which can contaminate the object being gripped, especially in clean-room environments.
Innovation Solution
The apparatus employs magnetic elements to selectively grip objects without surface rubbing, using a first gripping member with a first magnetic element and a second magnetic element that can interact to overcome a biasing member, allowing the gripping member to move between gripping and releasing positions without generating particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If traditional mechanical gripping apparatuses are used, then gripping force can be applied to hold objects, but surfaces rub together during operation generating particles that contaminate the object
Solution Approach 1:
The patent replaces traditional mechanical gripping systems with a magnetic field-based gripping system. Magnetic elements generate magnetic fields that interact with ferromagnetic materials in the object to be gripped, eliminating the need for mechanical contact and surface rubbing between gripping surfaces, thereby preventing particle generation while maintaining reliable gripping force
Solution Approach 2:
The patent introduces magnetic fields as an intermediary between the gripping apparatus and the object. Instead of direct mechanical contact, the magnetic field acts as a mediator to transmit gripping force to the object through magnetic attraction, avoiding direct surface contact and the associated particle contamination
2Object-affected harmful factors
If magnetic elements are used to grip objects without surface rubbing, then particle generation is minimized, but the device complexity increases due to additional magnetic components and biasing members
Solution Approach 1:
The patent combines multiple functions into integrated components. The biasing members are incorporated into the gripping member structure itself, and the magnetic elements are integrated with the gripping surfaces, eliminating the need for separate actuation mechanisms and reducing overall device complexity despite the introduction of magnetic components
3Object-affected harmful factors
If biasing members are used to return gripping members to release position, then gripping and releasing can be achieved without surface rubbing, but the force required to overcome the biasing member may affect gripping precision
Solution Approach 1:
The patent employs adjustable magnetic field strength parameters to precisely control gripping force. By varying the current through the electromagnet or adjusting the position of permanent magnets, the magnetic attraction force can be precisely tuned to match the biasing member force, enabling accurate positioning and release without excessive force that would compromise precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution minimizes particle generation by ensuring that no surfaces rub together during operation, maintaining cleanliness in environments like lithographic systems and clean rooms.
Implementation Method 1
a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position
Data Source
AI summary
An apparatus including: a first gripping member having a first magnetic element and moveable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; and a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position.