Magnetic Linear Guideway Assembly for Clean Vacuum Motion
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Solution Overview
Problem
Magnetic bearing applications in high-tech systems face challenges such as limited design dimensions, complex design, high cost, and contamination issues due to mechanical friction and lubrication needs, which restrict their use in high cleanliness and vacuum environments.
Innovation Solution
A linear guideway assembly with multiple magnetic bearing assemblies mounted on a product carrier to constrain five degrees of freedom while allowing one translational degree of freedom, eliminating the need for vacuum seals and minimizing contamination by using a single linear guideway with magnetic bearing modules comprising a ferromagnetic core, magnetic elements, and coils for contactless displacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If magnetic bearing assemblies are used for contactless displacement, then particle contamination and molecular contamination are minimized, but device complexity and cost increase
Solution Approach 1:
The linear guideway assembly is divided into multiple independent magnetic bearing assemblies (first, second, third, and fourth magnetic bearing assemblies), each responsible for constraining specific degrees of freedom. This segmentation allows the system to achieve contactless support while maintaining manageable complexity through modular design.
Solution Approach 2:
Each magnetic bearing assembly serves multiple functions: providing contactless support, constraining specific degrees of freedom, and preventing contamination. The magnetic bearing assemblies universally address both the contamination problem and the mechanical support requirement simultaneously.
2Object-generated harmful factors
If magnetic bearing assemblies are used for contactless displacement, then particle contamination and molecular contamination are minimized, but cost increases
Solution Approach 1:
The patent replaces traditional mechanical bearing systems (rolling element bearings, fluid bearings) with magnetic bearing assemblies that use magnetic fields for contactless support. This substitution eliminates the need for lubrication and mechanical contact, thereby preventing molecular contamination from lubricant outgassing and particle contamination from wear.
3Manufacturing precision
If multiple degrees of freedom are constrained by magnetic bearing assemblies, then displacement accuracy is improved, but device complexity and cost increase
Solution Approach 1:
The constraint system is segmented into four distinct magnetic bearing assemblies, each targeting specific degrees of freedom (first assembly constrains one degree, second assembly constrains another degree, etc.). This segmentation achieves precise control of all six degrees of freedom while keeping each individual bearing assembly relatively simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a cost-effective, contamination-free, and frictionless linear displacement mechanism suitable for high cleanliness and vacuum environments, enhancing accessibility and reducing power dissipation by constraining unwanted movements and minimizing particle and molecular contamination.
Implementation Method 1
A linear guideway assembly with multiple magnetic bearing assemblies mounted on a product carrier to constrain five degrees of freedom while allowing one translational degree of freedom
Implementation Method 2
contactless displacement of the at least one product carrier relative to the single, linear guideway
Implementation Method 3
magnetic bearing assemblies mounted to the product carrier in such way that the magnetic bearing assemblies are arranged in constraining five degrees of freedom
Implementation Method 4
magnetic bearing modules comprising a ferromagnetic core, magnetic elements, and coils for contactless displacement
Data Source
AI summary
The invention relates to a linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path (x), said linear guideway assembly comprising: one, single rigid body formed as a linear guideway defining said linear displacement path as well as at least one rigid body formed as a product carrier being displaceable along said single linear guideway, wherein the linear guideway assembly further comprises multiple magnetic bearing assemblies for allowing contactless linear displacement of the at least one product carrier relative to the single, linear guideway, wherein all magnetic bearing assemblies are mounted to the product carrier in such way that the magnetic bearing assemblies are arranged in constraining five degrees of freedom (y, z, θ, Φ and ψ) of the product carrier relative to the single, linear guideway, whilst allowing one, translational degree of freedom (x) of the product carrier along the single, linear guideway, wherein all magnetic bearing assemblies, seen in the translational direction (x) of the linear displacement path, are mounted at the side of the product carrier closest to the single, linear guideway.