Magnetic Holding Mechanism for Substrate Spin Table
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Solution Overview
Problem
Conventional substrate treating apparatuses are complex and heavy due to reliance on elastic forces and magnetic forces for holding substrates, requiring unnecessary components like springs, cam plates, and lifting plates, which complicates maintenance and increases operator burden.
Innovation Solution
A substrate treating apparatus utilizing a magnetic holding mechanism with rotating support pins, where magnetic fields switch between holding and delivery positions, eliminating the need for elastic components and simplifying the construction, allowing for easy maintenance and reduced weight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If elastic force of spring and magnetic force are used to hold and release substrate, then substrate holding and release function is achieved, but construction becomes complicated and weight increases
Solution Approach 1:
The patent extracts and removes the spring component from the system, replacing the elastic force mechanism with a pure magnetic force mechanism. The support pin's rotation is controlled solely by magnetic interaction between the first magnetic part and second magnetic part, eliminating the need for springs, cam plates, and lifting plates, thus simplifying the construction while maintaining reliable substrate holding and release functions
Solution Approach 2:
The patent replaces the mechanical spring-based elastic force system with a magnetic force system. The support pin's holding and release operations are achieved through magnetic attraction and repulsion between magnetic parts, substituting mechanical components with magnetic field-based control, which reduces construction complexity and weight
2Reliability
If spring, cam plate, and lifting plate are used for substrate release, then substrate release function is achieved, but spin table weight increases
Solution Approach 1:
The patent extracts and removes the heavy mechanical components (spring, cam plate, lifting plate) from the spin table assembly. The substrate release function is achieved solely through magnetic interaction, eliminating the need for these weighty components and significantly reducing the spin table's overall weight
Solution Approach 2:
The patent substitutes the heavy mechanical release mechanism with a lightweight magnetic field-based system. The second magnetic part's rotation to the release position is controlled by magnetic repulsion from the first magnetic part, replacing the need for cam plates and lifting plates, thus reducing spin table weight while maintaining reliable substrate release
3Ease of operation
If complex construction with multiple components is used, then substrate holding and release control is precise, but maintenance difficulty increases and operator burden increases
Solution Approach 1:
The patent extracts and removes multiple complex components (spring, cam plate, lifting plate) from the system, leaving only the essential support pin and magnetic parts. This simplification makes maintenance easier and reduces operator burden, while the magnetic control mechanism maintains precise operation for substrate holding and release
Solution Approach 2:
The patent replaces the complex mechanical control system with a simpler magnetic field-based control system. The magnetic interaction between magnetic parts provides precise control over support pin rotation and substrate release, eliminating the need for complex mechanical linkages, thereby improving ease of repair and reducing operator burden
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnetic holding mechanism reduces the weight and complexity of the spin table, enabling easier maintenance and preventing substrate removal during power failures, while ensuring secure substrate retention.
Implementation Method 1
the first magnetic part and the second magnetic part are arranged such that they attract each other by a magnetic force
Implementation Method 2
the magnets of the first lifting plate and the lifting plate are arranged such that poles thereof repelling each other face each other
Data Source
AI summary
Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a holding mechanism including a plurality of support pins configured to rotate between a holding position and a delivery position, a first magnetic part configured to rotate the support pins individually between the holding position and the delivery position by switching surrounding magnetic poles, and a second magnetic part configured to rotate the support pins individually to the holding position by constantly applying a magnetic field to the first magnetic part; and a switching mechanism configured to apply no magnetic field of a third magnetic part to the first magnetic part normally and apply a magnetic field of the third magnetic part to the first magnetic part to rotate the support pins individually to the delivery position only when the substrate is delivered.