Magnetic Latch for Planetary Coating Systems
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Solution Overview
Problem
Conventional planetary gear coating systems require manual labor and are prone to misalignment due to temperature and pressure changes, and existing magnetic solutions are difficult to implement in planetary systems due to power delivery and particulate generation issues.
Innovation Solution
A magnetic latch system with a permanent magnet and a movable mounting surface that can attract and release substrate holders without mechanical fasteners, allowing for secure attachment and detachment in a vacuum environment, using a cylindrical stator and rotor design with actuator control to manage magnetic circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If mechanical fasteners are used to attach substrate holders to spindles, then secure attachment is achieved, but manual labor increases and misalignment occurs due to temperature and pressure changes
Solution Approach 1:
The patent replaces mechanical fasteners (screws, bolts) with a magnetic attachment system. The magnetic latch uses magnetic force to hold the substrate holder on the spindle, eliminating the need for manual mechanical fastening and unfastening operations. This substitution of mechanical connection with magnetic connection resolves the contradiction by maintaining secure attachment while eliminating manual labor requirements.
Solution Approach 2:
The magnetic latch mechanism changes the magnetic field parameters (strength, polarity) to control attachment and detachment. By varying the magnetic field parameters through actuation, the system achieves secure attachment during coating and easy detachment when needed, resolving the contradiction between reliable attachment and ease of operation.
2Reliability
If mechanical fasteners are used to attach substrate holders to spindles, then secure attachment is achieved, but misalignment occurs due to temperature and pressure changes
Solution Approach 1:
The magnetic attachment system replaces mechanical fasteners that are susceptible to thermal expansion and pressure-induced misalignment. The magnetic field is not affected by temperature and pressure changes in the same way mechanical components are, thereby maintaining alignment precision while achieving reliable attachment.
3Object-generated harmful factors
If electromagnetic magnets are used to levitate substrate holders, then mechanical contact is minimized, but power delivery becomes difficult in vacuum and high temperature environments
Solution Approach 1:
The patent extracts the power source from the vacuum chamber environment by using a permanent magnet on the spindle (which does not require power) and a magnetizable mounting surface on the substrate holder. The magnetic field is established passively without requiring electromagnetic coils inside the vacuum chamber, thereby eliminating the power delivery complexity while still achieving contactless magnetic attachment.
Solution Approach 2:
The system uses simple permanent magnets and magnetizable materials instead of complex electromagnetic systems requiring power delivery through vacuum seals. This simpler, more robust solution is better suited for the vacuum and high temperature environment, resolving the contradiction by eliminating particulate generation from mechanical contact while avoiding power delivery complexity.
4Productivity
If a magnetic latch system is implemented, then manual labor is reduced and particulate generation is minimized, but complex magnetic circuit control is required
Solution Approach 1:
The magnetic latch system is segmented into distinct components: a permanent magnet on the spindle, a magnetizable mounting surface on the substrate holder, and an optional actuator for release. This segmentation allows the magnetic circuit control to be simplified, with the permanent magnet providing passive holding force and the actuator providing active release capability when needed, thereby achieving high productivity without excessive complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables secure, shock-free attachment and detachment of substrate holders in a planetary coating system, reducing manual labor and particulate generation, while maintaining vacuum integrity and allowing for even coating distribution.
Implementation Method 1
a magnetic latch on an end of each spindle including a permanent magnet, and a mounting surface for receiving a substrate holder; wherein each magnetic latch includes a first section, and a second section movable relative to the first section between a first position in which the permanent magnet magnetizes the mounting surface for attracting a substrate holder
Data Source
AI summary
The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.