Magnetic Latch Reticle Container for Semiconductor Storage
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Solution Overview
Problem
Existing reticle containers are complex and expensive due to features like filters and seals, making them less suitable for storage and transportation of reticles.
Innovation Solution
A reticle container with a magnetic latch system, comprising a first container segment with ferromagnetic material and a second segment with magnets, allowing secure closure and clamping of reticles across varying thicknesses while minimizing particle generation and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional reticle containers include filters, seals, and other processing features, then the containers are suitable for reticle processing, but the containers become more complex and expensive
Solution Approach 1:
The container is divided into two distinct segments: an inner pod for reticle processing and an outer pod for storage and transportation. The magnetic latch system is implemented as a separate closure mechanism that connects these segments. This segmentation allows each part to be optimized for its specific function without requiring the entire container to have all processing features.
Solution Approach 2:
The magnetic latch system serves multiple functions: it secures the container during storage and transportation, provides clamping force across varying reticle thicknesses, and can be opened easily for retrieval. The same magnetic mechanism works universally for different reticle types and thicknesses without requiring adjustment or modification.
2Reliability
If traditional reticle containers include filters, seals, and other processing features, then the containers are suitable for reticle processing, but the containers become more expensive
Solution Approach 1:
By separating the processing features (filters, seals) from the storage function, the inner pod can be manufactured with only the necessary processing features, while the outer pod is a simpler storage container. This reduces the overall manufacturing complexity and cost compared to making the entire container with full processing capabilities.
Solution Approach 2:
The magnetic latch system uses inexpensive magnetic materials and ferromagnetic components that can be easily manufactured and replaced if needed, rather than requiring expensive complex mechanical locking mechanisms or specialized sealing systems in the closure.
3Object-affected harmful factors
If magnetic latch is used to secure and clamp reticles, then particle generation is reduced and contamination is minimized, but the latch mechanism adds complexity
Solution Approach 1:
The magnetic latch system replaces complex mechanical locking mechanisms, springs, and latches with a simple magnetic field-based closure. The magnetic attraction between the magnets in one pod and ferromagnetic material in the other pod provides secure closure without requiring complex mechanical parts that could generate particles or fail.
Solution Approach 2:
The magnetic latch system is self-actuating - when the pods are brought together, the magnetic attraction automatically secures them without requiring additional mechanical actuators, springs, or complex positioning mechanisms. The system serves itself through the inherent magnetic field interaction.
4Adaptability or versatility
If magnetic latch provides closure and clamping across different reticle thicknesses, then adaptability is improved, but the magnetic field uniformity becomes more challenging
Solution Approach 1:
The magnetic latch system allows for dynamic adjustment of the clamping force through the interaction between the magnetic field and the ferromagnetic material. The ferromagnetic material can be positioned at different locations or have varying properties to accommodate different reticle thicknesses, allowing the system to adapt to various conditions without requiring precise pre-calibration for each thickness.
Solution Approach 2:
The system accommodates different reticle thicknesses by changing the parameters of the magnetic interaction - specifically, by adjusting the position, strength, or distribution of the ferromagnetic material in response to the detected reticle thickness, thereby maintaining effective clamping across varying dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnetic latch system provides secure retention of reticles, reduces particle contamination, and accommodates different reticle thicknesses, enhancing storage and transportation efficiency.
Implementation Method 1
a magnetic latch for closure of the container... where the one or more magnets attracts the ferromagnetic material of the first container segment
Implementation Method 2
an unlatched state the attraction between the ferromagnetic material and the one or more magnets is reduced such that the first container segment can be separated from the second container segment
Data Source
AI summary
Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.