Magnetic Lens Array Fine-Tuning via Pulsed Laser Irradiation

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Solution Overview

Problem

Conventional methods for adjusting the strength of magnetic devices, such as temperature control, are inadequate in addressing non-uniformities introduced during manufacturing, particularly in magnetic lens arrays, which can lead to defects like astigmatism and peak field strength variations.

Innovation Solution

A system utilizing a translatable stage, magnetic field sensors, and a pulsed laser to apply targeted energy delivery at specific wavelengths to correct non-uniformities in magnetic fields, avoiding excessive heating and enabling precise adjustment of local magnetism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If temperature control is used to adjust magnetic strength, then the entire magnet array can be adjusted uniformly, but it cannot correct local non-uniformities and requires excessive heating

Engineering Contradiction:
Improvemagnetic field uniformityVSAvoidenergy consumption for heating
Core Design Contradiction:
Manufacturing precisionVSUse of energy by stationary object

Solution Approach 1:

The patent applies localized laser irradiation to specific regions of the magnet array where non-uniformities are detected, rather than heating the entire array. This localized approach allows precise correction of magnetic field deviations at specific locations while minimizing overall energy consumption and avoiding excessive heating of the entire system.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the physical state of the magnet material by applying pulsed laser energy, which temporarily alters the magnetic properties of irradiated regions. By controlling laser parameters (duration, intensity, wavelength), the system can induce controlled changes in magnetic field strength to correct non-uniformities without requiring sustained high-temperature heating.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If conventional temperature control is used, then simple equipment is required, but it cannot correct local non-uniformities and requires re-machining

Engineering Contradiction:
Improvemagnetic field uniformityVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent incorporates a feedback mechanism where magnetic field sensors measure the actual field distribution, a computer analyzes the data to identify non-uniformities, and the system automatically adjusts laser irradiation parameters to correct detected deviations. This closed-loop feedback system enables precise correction of local non-uniformities without requiring complex re-machining operations.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent introduces a computer-controlled laser system as an intermediary between the magnet array and the correction process. Rather than directly modifying the magnet structure through re-machining, the laser serves as a non-contact intermediary that delivers precise energy to induce desired magnetic property changes, simplifying the overall correction process.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If laser pulses are applied to correct non-uniformities, then local magnetic strength can be precisely adjusted, but targeted energy delivery is required to avoid excessive heating

Engineering Contradiction:
Improvelocal magnetic field adjustmentVSAvoidlocal heating
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The patent employs periodic pulsed laser irradiation rather than continuous heating. The pulsed delivery allows the material to cool between pulses, preventing excessive temperature accumulation while still delivering sufficient energy to induce the desired magnetic property changes. This periodic action enables precise local adjustment without causing harmful overheating.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent uses ultra-short duration laser pulses (femtosecond to picosecond range) that deliver energy so quickly that heat does not have time to diffuse to surrounding areas. This 'rushing through' approach allows the laser energy to be absorbed and converted to magnetic property changes before thermal diffusion can occur, achieving precise local modification without significant heating of adjacent regions.

Inventive Principle:
Principle #21Skipping (Rushing through)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the fine-tuning of magnetic lens arrays, improving electron optics and imaging performance by correcting defects without re-machining magnetized parts, thus enhancing the manufacturing process and product quality.

Implementation Method 1

a laser device that applies the pulsed laser beam to correct the non-uniformity

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

The targeted energy delivery effectively excites and/or distorts the lattice structure of the material

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 3

a sensor that measures a magnetic field at locations above the magnet array so as to generate magnetic field data

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS9779872B2Apparatus and method for fine-tuning magnet arrays with localized energy delivery
Publication Date: 2017.10.03 KLA CORP
  • US9779872B2 patent drawing
  • US9779872B2 patent drawing
  • US9779872B2 patent drawing

AI summary

One embodiment relates to an apparatus for adjustment of local magnetic strength in a magnetic device. A stage holds the magnetic device, and a sensor measures a magnetic field at locations above the magnetic device so as to generate magnetic field data. A computer system detects a non-uniformity in the magnetic field from the magnetic field data and determines a location and a duration for application of a pulsed laser beam to correct the non-uniformity. A laser device applies the pulsed laser beam at said location for said duration. Another embodiment relates to a method of adjusting local magnetic strength in a magnetic device. Another embodiment relates to a system for fine-tuning a magnet array with localized energy delivery. Other embodiments, aspects and features are also disclosed.