Magnetic Lens Assembly Centering Element for Pole Piece Alignment
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Solution Overview
Problem
The precise manufacturing and alignment of magnetic lens components in charged particle beam devices, particularly conically shaped objective lenses, are challenging due to the sensitivity of magnetically soft materials to stress, which affects the resolution and imaging quality of these devices.
Innovation Solution
A magnetic lens assembly with a centering element made of a material with a lower Young's modulus than the pole pieces, such as a ring-shaped plastic or elastic material, is used to align and connect the pole pieces, minimizing stress and tension during assembly and improving accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If pole pieces are precisely manufactured and aligned to achieve high quality imaging properties, then imaging quality is improved, but manufacturing complexity and difficulty increase
Solution Approach 1:
A centering element is introduced as an intermediary component between the first and second pole pieces. This centering element facilitates precise alignment and centering of the pole pieces during assembly, thereby achieving high manufacturing precision without significantly increasing overall device complexity. The centering element acts as a mediator that simplifies the alignment process compared to direct precise manufacturing and alignment of the pole pieces themselves.
2Manufacturing precision
If conically shaped objective lens is used for scanning charged particle beam device, then imaging quality is improved, but difficulty of manufacture and alignment increases
Solution Approach 1:
The conically shaped objective lens is segmented into separate components: a first pole piece and a second pole piece, which are connected via a centering element. This segmentation allows each component to be manufactured separately with standard precision, avoiding the difficulty of manufacturing a complete conical lens as a single precision component. The centering element further simplifies the assembly process by providing automatic centering functionality.
3Measurement precision
If magnetic lens components are precisely aligned, then resolution is improved, but stress on magnetically soft materials increases
Solution Approach 1:
The centering element is made from a material with different mechanical properties (different Young's modulus) than the pole pieces. This parameter change in material properties allows the centering element to accommodate dimensional variations and reduce stress transmission to the magnetically soft pole piece materials, while still maintaining the precise alignment necessary for high resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for higher accuracy in the positioning of lens components, reducing manufacturing complexity and tension, thereby enhancing the resolution and imaging quality of charged particle beam devices.
Implementation Method 1
a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece
Implementation Method 2
a coil for exciting the magnetic lens assembly
Implementation Method 3
a magnetic lens assembly for a charged particle beam system
Data Source
AI summary
A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.