Magnetic Lens Electrical Isolation for Water-Cooled Beam Reliability
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Solution Overview
Problem
Water-cooling in magnetic lenses of charged particle beam devices can negatively affect reliability due to leakage, leading to electromagnetic noise and potential defects.
Innovation Solution
Incorporating an electrical insulator to insulate the coil carrier from the pole pieces, reducing electromagnetic noise and enabling detection of defects through electrical characteristic measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If water-cooling is implemented in the magnetic lens, then the range of available currents and thermal stability are improved, but the reliability deteriorates due to leakage risks
Solution Approach 1:
The patent introduces an electrical insulator as an intermediary component between the water-cooled coil carrier and the pole pieces. This insulator mediates the interaction between the cooling system and the magnetic circuit, allowing thermal management while preventing direct water contact with electrical components, thus eliminating leakage risks while maintaining cooling benefits
Solution Approach 2:
The magnetic lens is segmented into distinct functional zones: a water-cooled coil carrier for thermal management, an electrical insulator layer for isolation, and pole pieces for magnetic field generation. This segmentation allows each component to be optimized for its specific function while minimizing interference and reliability issues
2Power
If water-cooling is implemented in the magnetic lens, then the range of available currents is improved, but electromagnetic noise increases leading to potential defects
Solution Approach 1:
The electrical insulator serves as a mediator that blocks electromagnetic noise propagation from the water-cooled coil carrier to the pole pieces and detector, while still allowing the high current operation needed for extended imaging capabilities
Solution Approach 2:
The patent converts the potentially harmful electromagnetic noise generated by water-cooled high-current operation into a detectable signal characteristic. By using the insulator to block direct noise transmission, the system can operate at higher currents beneficial for imaging while the insulator itself becomes a reference for noise cancellation algorithms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the reliability of magnetic lenses by minimizing electromagnetic interference and allowing for early detection of defects, thus maintaining the integrity of the charged particle beam device.
Implementation Method 1
an electrical insulator configured to electrically insulate the coil carrier and the at least one pole piece from each other
Implementation Method 2
The coil may be configured for generating the magnetic field of the magnetic lens
Implementation Method 3
A charged particle beam device, particularly a scanning charged particle beam device, includes an objective lens focusing the primary charged particle beam emitted by an emitter on a specimen
Data Source
AI summary
An apparatus for a charged particle beam device is described. The charged particle beam device includes: a magnetic lens with a coil carrier; at least one pole piece; and an electrical insulator configured to electrically insulate the coil carrier and the at least one pole piece from each other.