Magnetic Levitation Rotor for Contamination-Free Processing
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Solution Overview
Problem
Existing processing systems for sensitive work pieces, such as integrated circuit substrates, face contamination risks due to lubricants and sliding contacts, which are avoided by magnetic actuators and bearings but require improved mechanisms for contactless levitation and rotation in a contamination-free environment.
Innovation Solution
A processing system with a housing, rotor, lift actuators, levitation actuators, and an annular stator assembly that contactlessly levitates and rotates the rotor using magnetic forces, allowing for linear and angular displacement of work pieces within a hermetically sealed chamber, enabling contamination-free processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If magnetic actuators and bearings are used to contactlessly move support members, then contamination from lubricants and sliding contact debris is eliminated, but the complexity of the magnetic actuation system increases
Solution Approach 1:
The magnetic actuation system is divided into separate functional modules: lift actuators for vertical movement, levitation actuators for contactless support, and motor stators for rotation. Each module operates independently, allowing for targeted optimization and easier maintenance while maintaining the overall contamination-free environment.
Solution Approach 2:
Magnetic fields serve as intermediaries between the actuators and the support members, enabling contactless force transmission. This eliminates the need for direct mechanical contact and lubricants, thereby preventing contamination while transferring motion and force effectively.
2Measurement precision
If multiple actuators are used for precise linear and angular displacement, then positioning accuracy of work pieces is improved, but the number of components and system complexity increases
Solution Approach 1:
Multiple actuators are strategically positioned and coordinated to perform both linear and angular displacement functions. The lift actuators and levitation actuators work in combination with motor stators to achieve six-degree-of-freedom positioning, merging multiple functions into an integrated system that reduces overall complexity compared to separate positioning mechanisms.
Solution Approach 2:
The magnetic actuators are designed to perform multiple functions: lift actuators provide both vertical positioning and stabilization, while motor stators enable both rotation and positional adjustment. This multi-functionality reduces the total number of components needed while maintaining high positioning accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively maintains a contamination-free environment by using magnetic levitation and rotation to support work pieces, eliminating the need for lubricants and preventing debris generation, thus ensuring clean processing operations.
Implementation Method 1
At least one levitation actuator is spaced above the rotor and is configured to exert a magnetic pulling force on the rotor to levitate the rotor upwardly from the transfer vertical position to a working vertical position
Implementation Method 2
an annular stator assembly is coupled with the housing, disposed about and spaced radially outwardly from the rotor and includes a motor stator, the at least one lift actuator being configured to vertically displace the rotor relative to the stator assembly
Data Source
AI summary
A processing system includes a housing having an interior chamber and a central vertical axis extending through the interior chamber. A rotor is disposed within the housing interior chamber and is configured to support one or more work pieces. At least one lift actuator is configured to linearly displace the rotor along the central vertical axis between a lower, inactive vertical position and an upper, transfer vertical position. At least one levitation actuator is spaced above the rotor and is configured to exert a magnetic pulling force on the rotor to levitate the rotor upwardly from the transfer vertical position to a working vertical position. Further, an annular stator assembly is coupled with the housing, is disposed about and spaced radially outwardly from the rotor and includes a motor stator, the at least one lift actuator being configured to vertically displace the rotor relative to the stator assembly.